Inventor · disambiguated record
Jagan Rangarajan
Also filed as: RANGARAJAN JAGAN
18 granted patents·17 pending applications·45 citations·filing 2009–2024
90Inventor score
Top patents by PatentIndex Score
35 records- 0188US11705354B2Substrate handling systemsAPPLIED MATERIALS INC·Filed 2020·Granted Jul 18, 2023·2 cites·16 claims
- 0288US9227293B2Multi-platen multi-head polishing architectureAPPLIED MATERIALS INC·Filed 2013·Granted Jan 5, 2016·6 cites·19 claims
- 0387US8322963B2End effector for a cluster toolHUDGENS JEFFREY C·Filed 2009·Granted Dec 4, 2012·20 cites·10 claims
- 0486US11749552B2Wafer processing tools and methods thereofAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·2 cites·14 claims
- 0585US8172643B2Polishing system having a trackYILMAZ ALPAY·Filed 2009·Granted May 8, 2012·11 cites·21 claims
- 0679US11693435B2Ethercat liquid flow controller communication for substrate processing systemsAPPLIED MATERIALS INC·Filed 2021·Granted Jul 4, 2023·1 cites·20 claims
- 0776US12142513B2Wafer processing tools and methods thereofAPPLIED MATERIALS INC·Filed 2023·Granted Nov 12, 2024·0 cites·20 claims
- 0876US11289347B2Non-contact clean moduleAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·2 cites·16 claims
- 0969US2025114902A1Horizontal pre-clean 2-stage downforce mechanism with flexureAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1068US2024100714A1Method and apparatus for processing a substrate in cleaning modulesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1167US2024100713A1Method and apparatus for processing a substrate in cleaning modulesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1266US12400892B2High throughput polishing modules and modular polishing systemsAPPLIED MATERIALS INC·Filed 2020·Granted Aug 26, 2025·0 cites·24 claims
- 1365US12394651B2High throughput polishing modules and modular polishing systemsAPPLIED MATERIALS INC·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
- 1461US11721563B2Non-contact clean moduleAPPLIED MATERIALS INC·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 1561US2021323117A1High throughput polishing modules and modular polishing systemsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1660US2016101497A1Multi-Platen Multi-Head Polishing ArchitectureAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 1759US2022134505A1Horizontal buffing moduleAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1856US12500094B2Modular fluid delivery assemblyAPPLIED MATERIALS INC·Filed 2023·Granted Dec 16, 2025·0 cites·14 claims
- 1956US2024412985A1Dedicated sulfuric-peroxide process module for post-cmp cleaning platformsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2055US2024363371A1Substrate cleaning improvementAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2153US8444129B2Methods of verifying effectiveness of a put of a substrate onto a substrate supportMACLEOD DOUGLAS·Filed 2009·Granted May 21, 2013·1 cites·20 claims
- 2252US2025332615A1Processing module having a priming systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2351US12198944B2Substrate handling in a modular polishing system with single substrate cleaning chambersAPPLIED MATERIALS INC·Filed 2021·Granted Jan 14, 2025·0 cites·15 claims
- 2451US11942319B2Pad carrier for horizontal pre-clean moduleAPPLIED MATERIALS INC·Filed 2021·Granted Mar 26, 2024·0 cites·15 claims
- 2551US2012208438A1Polishing system having a trackYILMAZ ALPAY·Filed 2012·Application pending·0 cites
- 2651US2024395579A1Droplet jet nozzle designAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2748US2024390924A1Droplet jet nozzle designAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2847US2010130107A1Method and apparatus for linear pad conditioningAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 2945US11745227B2Substrate cleaning devices and methods thereofAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·0 cites·14 claims
- 3045US11735438B2Methods and apparatus for Marangoni dryingAPPLIED MATERIALS INC·Filed 2019·Granted Aug 22, 2023·0 cites·19 claims
- 3143US10751738B2Spray bar design for uniform liquid flow distribution on a substrateAPPLIED MATERIALS INC·Filed 2017·Granted Aug 25, 2020·0 cites·20 claims
- 3243US2014020830A1Carrier Head Sweep Motor Current for In-Situ MonitoringRANGARAJAN JAGAN·Filed 2012·Application pending·0 cites
- 3343US2013199405A1Circular track actuator systemRANGARAJAN JAGAN·Filed 2012·Application pending·0 cites
- 3442US2013115862A1Chemical mechanical polishing platform architectureRANGARAJAN JAGAN·Filed 2011·Application pending·0 cites
- 3541US2012322345A1Apparatus for chemical mechanical polishingRANGARAJAN JAGAN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →