Inventor · disambiguated record
Jerrell K. Antolik
Also filed as: ANTOLIK JERRELL K · ANTOLIK JERRELL KENT
1 granted patent·1 pending application·1 citations·filing 2015–2023
17Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0162USRE47275ESubstrate support providing gap height and planarization adjustment in plasma processing chamberLAM RES CORP·Filed 2015·Granted Mar 5, 2019·1 cites·71 claims
- 0245US2025183011A1Liquid cooling plate for cooling of dielectric window of a substrate processing systemLAM RES CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →