Inventor · disambiguated record
Jerrel K. Antolik
Also filed as: ANTOLIK JERREL K · ANTOLIK JERREL KENT
12 granted patents·1 pending application·97 citations·filing 2001–2024
90Inventor score
Top patents by PatentIndex Score
13 records- 0187US11495486B2Integrated tool liftLAM RES CORP·Filed 2020·Granted Nov 8, 2022·2 cites·37 claims
- 0287US10049862B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2016·Granted Aug 14, 2018·4 cites·25 claims
- 0387US8895452B2Substrate support providing gap height and planarization adjustment in plasma processing chamberANTOLIK JERREL KENT·Filed 2012·Granted Nov 25, 2014·12 cites·22 claims
- 0487US8043430B2Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamberLAM RES CORP·Filed 2006·Granted Oct 25, 2011·12 cites·12 claims
- 0584US6936135B2Twist-N-Lock wafer area pressure ring and assembly for reducing particulate contaminant in a plasma processing chamberLAM RES CORP·Filed 2003·Granted Aug 30, 2005·36 cites·17 claims
- 0677US10665435B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2019·Granted May 26, 2020·1 cites·20 claims
- 0775US10395902B2Chamber with vertical support stem for symmetric conductance and RF deliveryLAM RES CORP·Filed 2018·Granted Aug 27, 2019·1 cites·27 claims
- 0875US2024304490A1Integrated tool liftLAM RES CORP·Filed 2024·Application pending·0 cites
- 0973US12027411B2Integrated tool liftLAM RES CORP·Filed 2022·Granted Jul 2, 2024·0 cites·24 claims
- 1071US11127610B2Split chamber assemblyLAM RES CORP·Filed 2019·Granted Sep 21, 2021·1 cites·13 claims
- 1169US7211170B2Twist-N-Lock wafer area pressure ring and assemblyLAM RES CORP·Filed 2001·Granted May 1, 2007·14 cites·14 claims
- 1268US6926803B2Confinement ring support assemblyLAM RES CORP·Filed 2003·Granted Aug 9, 2005·13 cites·29 claims
- 1364US8784948B2Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamberDHINDSA RAJINDER·Filed 2011·Granted Jul 22, 2014·1 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →