Inventor · disambiguated record
Jens Prochnau
Also filed as: PROCHNAU JENS
13 granted patents·2 pending applications·9 citations·filing 2016–2025
84Inventor score
Top patents by PatentIndex Score
15 records- 0186US10007186B2Optical arrangement of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2017·Granted Jun 26, 2018·3 cites·20 claims
- 0278US10095126B2Moveably mounted component of projection exposure system, as well as device and method for movement limitation for sameZEISS CARL SMT GMBH·Filed 2017·Granted Oct 9, 2018·2 cites·21 claims
- 0370US10690941B2Lens arrangement, in particular a spectacle glass arrangement and method for producing a lens arrangementtooz technologies GmbH·Filed 2016·Granted Jun 23, 2020·1 cites·37 claims
- 0467US2025216797A1Optical element for a projection exposure system, optical system comprising same and projection exposure system comprising the optical element and/or the optical systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0566US10809636B2Optical arrangement, in particular lithography systemZEISS CARL SMT GMBH·Filed 2019·Granted Oct 20, 2020·2 cites·20 claims
- 0666US10670777B2Optical component and method for coating optical componenttooz technologies GmbH·Filed 2016·Granted Jun 2, 2020·1 cites·20 claims
- 0764US2025383598A1Mask inspection device and method for adjusting a mask inspection deviceZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0862US12372736B2Device for mounting spherical optical componentstooz technologies GmbH·Filed 2022·Granted Jul 29, 2025·0 cites·12 claims
- 0954US11029606B2Optical element for the beam guidance of imaging light in projection lithographyZEISS CARL SMT GMBH·Filed 2020·Granted Jun 8, 2021·0 cites·22 claims
- 1052US10761436B2Optical arrangement, in particular lithography system, with a transport lockZEISS CARL SMT GMBH·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 1146US11420364B2Optical component and method for the production of sametooz technologies GmbH·Filed 2016·Granted Aug 23, 2022·0 cites·10 claims
- 1246US10520838B2Mounting arrangement for an optical imaging arrangementZEISS CARL SMT GMBH·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 1342US9996015B2Mirror module, in particular for a microlithographic projection exposure appararatusZEISS CARL SMT GMBH·Filed 2017·Granted Jun 12, 2018·0 cites·20 claims
- 1440US9804500B2Optical imaging arrangement with simplified manufactureZEISS CARL SMT GMBH·Filed 2016·Granted Oct 31, 2017·0 cites·20 claims
- 1540US9632421B2Arrangement and lithography apparatus with arrangementZEISS CARL SMT GMBH·Filed 2016·Granted Apr 25, 2017·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →