Inventor · disambiguated record
Jeremy George Smith
Also filed as: SMITH JEREMY · SMITH JEREMY GEORGE
1 granted patent·6 pending applications·2 citations·filing 2017–2025
18Inventor score
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0175US2025263838A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2025·Application pending·0 cites
- 0271US12020960B2Determining and controlling substrate temperature during substrate processingLAM RES CORP·Filed 2019·Granted Jun 25, 2024·2 cites·20 claims
- 0366US2021292893A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2019·Application pending·0 cites
- 0444US2023178344A1Evaporative cooling of electrostatic chucksLAM RES CORP·Filed 2021·Application pending·0 cites
- 0543US2018240649A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2017·Application pending·0 cites
- 0642US2023253193A1Substrate support with uniform temperature across a substrateLAM RES CORP·Filed 2021·Application pending·0 cites
- 0734US2022130705A1Electrostatic chuck with powder coatingLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →