Inventor · disambiguated record
Jens Stäcker
Also filed as: STAECKER JENS · STÄCKER JENS
7 granted patents·20 citations·filing 2003–2020
79Inventor score
Top patents by PatentIndex Score
7 records- 0189US10627729B2Calibration method for a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·4 cites·15 claims
- 0267US10884345B2Calibration method for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jan 5, 2021·0 cites·15 claims
- 0351US6861331B2Method for aligning and exposing a semiconductor waferINFINEON TECHNOLOGIES AG·Filed 2003·Granted Mar 1, 2005·7 cites·10 claims
- 0450US7268877B2Method and apparatus for orienting semiconductor wafers in semiconductor fabricationINFINEON TECHNOLOGIES AG·Filed 2004·Granted Sep 11, 2007·4 cites·16 claims
- 0544US7186484B2Method for determining the relative positional accuracy of two structure elements on a waferINFINEON TECHNOLOGIES AG·Filed 2004·Granted Mar 6, 2007·3 cites·11 claims
- 0643US7310129B2Method for carrying out a double or multiple exposureINFINEON TECHNOLOGIES AG·Filed 2004·Granted Dec 18, 2007·2 cites·14 claims
- 0733US6896999B2Method of exposing a semiconductor wafer in an exposerINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 24, 2005·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →