Inventor · disambiguated record
Jin-Yuan Chen
Also filed as: CHEN JIN-YUAN
2 granted patents·6 pending applications·200 citations·filing 2000–2006
70Inventor score
Top patents by PatentIndex Score
8 records- 0197US6472822B1Pulsed RF power delivery for plasma processingAPPLIED MATERIALS INC·Filed 2000·Granted Oct 29, 2002·178 cites·34 claims
- 0284US6447637B1Process chamber having a voltage distribution electrodeAPPLIED MATERIALS INC·Filed 2000·Granted Sep 10, 2002·22 cites·12 claims
- 0352US2006175015A1Etch chamber with dual frequency biasing sources and a single frequency plasma generating sourceAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0451US2007020937A1Etch chamber with dual frequency biasing sources and a single frequency plasma generating sourceCHEN JIN-YUAN·Filed 2006·Application pending·0 cites
- 0540US2004025791A1Etch chamber with dual frequency biasing sources and a single frequency plasma generating sourceAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 0640US2003006009A1Process chamber having a voltage distribution electrodeAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 0734US2003003748A1Method of eliminating notching when anisotropically etching small linewidth openings in silicon on insulatorFiled 2001·Application pending·0 cites
- 0827US2004027209A1Fixed matching network with increased match range capabilitiesAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →