Inventor · disambiguated record
Jose I. Arno
Also filed as: ARNO JOSE · ARNO JOSE I
55 granted patents·24 pending applications·2,792 citations·filing 1998–2020
99Inventor score
Top patents by PatentIndex Score
79 records- 0198US8821640B2Solid precursor-based delivery of fluid utilizing controlled solids morphologyCLEARY JOHN M·Filed 2007·Granted Sep 2, 2014·536 cites·21 claims
- 0298US6749671B2Abatement of effluents from chemical vapor deposition processes using organometallic source reagentsADVANCED TECH MATERIALS·Filed 2003·Granted Jun 15, 2004·395 cites·20 claims
- 0398US6500487B1Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutionsADVANCED TECH MATERIALS·Filed 1999·Granted Dec 31, 2002·417 cites·61 claims
- 0496US6991671B2Rectangular parallelepiped fluid storage and dispensing vesselADVANCED TECH MATERIALS·Filed 2002·Granted Jan 31, 2006·52 cites·111 claims
- 0596US6833024B2Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutionsADANCED TECHNOLOGY MATERIALS I·Filed 2002·Granted Dec 21, 2004·383 cites·13 claims
- 0695US10895010B2Solid precursor-based delivery of fluid utilizing controlled solids morphologyENTEGRIS INC·Filed 2016·Granted Jan 19, 2021·5 cites·18 claims
- 0795US6620256B1Non-plasma in-situ cleaning of processing chambers using static flow methodsADVANCED TECH MATERIALS·Filed 2000·Granted Sep 16, 2003·80 cites·20 claims
- 0894US7943204B2Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantationADVANCED TECH MATERIALS·Filed 2006·Granted May 17, 2011·20 cites·18 claims
- 0994US6617175B1Infrared thermopile detector system for semiconductor process monitoring and controlADVANCED TECH MATERIALS·Filed 2002·Granted Sep 9, 2003·70 cites·29 claims
- 1093US6322756B1Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gasesADVANCED TECHNOLOGY AND MATERI·Filed 1999·Granted Nov 27, 2001·161 cites·35 claims
- 1192US7501010B2Rectangular parallelepiped fluid storage and dispending vesselADVANCED TECH MATERIALS·Filed 2005·Granted Mar 10, 2009·18 cites·35 claims
- 1292US7063097B2In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentrationADVANCED TECH MATERIALS·Filed 2003·Granted Jun 20, 2006·39 cites·78 claims
- 1391US7951225B2Fluid storage and dispensing systems, and fluid supply processes comprising sameADVANCED TECH MATERIALS·Filed 2006·Granted May 31, 2011·22 cites·25 claims
- 1491US7325560B2In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentrationADVANCED TECH MATERIALS·Filed 2006·Granted Feb 5, 2008·11 cites·41 claims
- 1591US7058519B2Photometrically modulated delivery of reagentsADVANCED TECH MATERIALS·Filed 2005·Granted Jun 6, 2006·15 cites·20 claims
- 1690US8282023B2Fluid storage and dispensing systems, and fluid supply processes comprising sameOLANDER W KARL·Filed 2011·Granted Oct 9, 2012·10 cites·22 claims
- 1790US6947138B2Optical sensor system and method for detection of hydrides and acid gasesADVANCED TECH MATERIALS·Filed 2003·Granted Sep 20, 2005·36 cites·58 claims
- 1890US6841141B2System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambersADVANCED TECH MATERIALS·Filed 2002·Granted Jan 11, 2005·36 cites·35 claims
- 1989US8389068B2Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantationOLANDER W KARL·Filed 2010·Granted Mar 5, 2013·8 cites·16 claims
- 2088US9868185B2Polishing pad with foundation layer and window attached theretoCABOT MICROELECTRONICS CORP·Filed 2015·Granted Jan 16, 2018·3 cites·28 claims
- 2188US8603252B2Cleaning of semiconductor processing systemsDIMEO FRANK·Filed 2007·Granted Dec 10, 2013·21 cites·6 claims
- 2286US6821795B2Infrared thermopile detector system for semiconductor process monitoring and controlADVANCED TECH MATERIALS·Filed 2003·Granted Nov 23, 2004·24 cites·29 claims
- 2386US6759018B1Method for point-of-use treatment of effluent gas streamsADVANCED TECH MATERIALS·Filed 1998·Granted Jul 6, 2004·62 cites·9 claims
- 2485US7011614B2Infrared thermopile detector system for semiconductor process monitoring and controlADVANCED TECH MATERIALS·Filed 2003·Granted Mar 14, 2006·21 cites·16 claims
- 2584US7373257B2Photometrically modulated delivery of reagentsADVANCED TECH MATERIALS·Filed 2006·Granted May 13, 2008·8 cites·23 claims
- 2684US7351976B2Monitoring system comprising infrared thermopile detectorADVANCED TECH MATERIALS·Filed 2006·Granted Apr 1, 2008·8 cites·25 claims
- 2784US6716271B1Apparatus and method for inhibiting decomposition of germaneADVANCED TECH MATERIALS·Filed 2002·Granted Apr 6, 2004·34 cites·27 claims
- 2883US7819981B2Methods for cleaning ion implanter componentsADVANCED TECH MATERIALS·Filed 2004·Granted Oct 26, 2010·16 cites·39 claims
- 2983US7723685B2Monitoring system comprising infrared thermopile detectorADVANCED TECH MATERIALS·Filed 2008·Granted May 25, 2010·5 cites·20 claims
- 3083US6909973B2Photometrically modulated delivery of reagentsADVANCED TECH MATERIALS·Filed 2003·Granted Jun 21, 2005·17 cites·42 claims
- 3183US6338312B2Integrated ion implant scrubber systemADVANCED TECH MATERIALS·Filed 1998·Granted Jan 15, 2002·52 cites·23 claims
- 3282US8506689B2Rectangular parallelepiped fluid storage and dispensing vesselBRESTOVANSKY DENNIS·Filed 2011·Granted Aug 13, 2013·5 cites·9 claims
- 3382US7972421B2Rectangular parallelepiped fluid storage and dispensing vesselADVANCED TECH MATERIALS·Filed 2009·Granted Jul 5, 2011·7 cites·5 claims
- 3481US7711496B2Photometrically modulated delivery of reagentsADVANCED TECH MATERIALS·Filed 2008·Granted May 4, 2010·4 cites·21 claims
- 3581US6905663B1Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gasFiled 2000·Granted Jun 14, 2005·22 cites·20 claims
- 3680US8244482B2Photometrically modulated delivery of reagentsARNO JOSE I·Filed 2011·Granted Aug 14, 2012·3 cites·20 claims
- 3779US8539781B2Component for solar adsorption refrigeration system and method of making such componentCARRUTHERS J DONALD·Filed 2008·Granted Sep 24, 2013·4 cites·17 claims
- 3878US9666435B2Apparatus and process for integrated gas blendingADVANCED TECH MATERIALS·Filed 2013·Granted May 30, 2017·4 cites·21 claims
- 3978US9062829B2Rectangular parallelepiped fluid storage and dispensing vesselMOROCO JUDITH A·Filed 2013·Granted Jun 23, 2015·3 cites·13 claims
- 4078US8003391B2Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making sameADVANCED TECH MATERIALS·Filed 2007·Granted Aug 23, 2011·8 cites·25 claims
- 4178US7172918B2Infrared thermopile detector system for semiconductor process monitoring and controlADVANCED TECH MATERIALS·Filed 2003·Granted Feb 6, 2007·13 cites·5 claims
- 4278US6576573B2Atmospheric pressure plasma enhanced abatement of semiconductor process effluent speciesADVANCED TECH MATERIALS·Filed 2001·Granted Jun 10, 2003·24 cites·24 claims
- 4377US7925450B2Photometrically modulated delivery of reagentsADVANCED TECH MATERIALS·Filed 2010·Granted Apr 12, 2011·2 cites·20 claims
- 4476US7018448B2Gas cabinet including integrated effluent scrubberADVANCED TECH MATERIALS·Filed 2003·Granted Mar 28, 2006·21 cites·20 claims
- 4576US6540814B2Integrated ion implant scrubber systemADVANCED TECH MATERIALS·Filed 2001·Granted Apr 1, 2003·22 cites·10 claims
- 4676US6537353B2Abatement of effluents from chemical vapor deposition processes using organometallic source reagentsADVANCED TECH MATERIALS·Filed 2001·Granted Mar 25, 2003·17 cites·4 claims
- 4775US9340878B2TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing sameARNO JOSE I·Filed 2010·Granted May 17, 2016·3 cites·9 claims
- 4873US2014329025A1Solid precursor-based delivery of fluid utilizing controlled solids morphologyENTEGRIS INC·Filed 2014·Application pending·0 cites
- 4972US7780747B2Apparatus and method for hydrogen generation from gaseous hydrideADVANCED TECH MATERIALS·Filed 2004·Granted Aug 24, 2010·10 cites·47 claims
- 5071US7129519B2Monitoring system comprising infrared thermopile detectorADVANCED TECH MATERIALS·Filed 2003·Granted Oct 31, 2006·11 cites·36 claims
Showing the top 50 of 79 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →