Inventor · disambiguated record
Johannes Marcus Maria Beltman
Also filed as: BELTMAN JOHANNES MARCUS MARIA
8 granted patents·227 citations·filing 1991–2022
86Inventor score
Technology areasG03F
Top patents by PatentIndex Score
8 records- 0198US11204239B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2020·Granted Dec 21, 2021·7 cites·36 claims
- 0297US11428521B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2021·Granted Aug 30, 2022·3 cites·29 claims
- 0397US10718604B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2019·Granted Jul 21, 2020·6 cites·22 claims
- 0496US5191200AImaging apparatus having a focus-error and/or tilt detection devicePHILIPS CORP·Filed 1991·Granted Mar 2, 1993·200 cites·52 claims
- 0594US10386176B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2015·Granted Aug 20, 2019·5 cites·20 claims
- 0693US10331043B2Optimization of target arrangement and associated targetASML NETHERLANDS BV·Filed 2015·Granted Jun 25, 2019·6 cites·20 claims
- 0782US12429328B2Metrology method, target and substrateASML NETHERLANDS BV·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 0846US10725372B2Method and apparatus for reticle optimizationASML NETHERLANDS BV·Filed 2016·Granted Jul 28, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →