Inventor · disambiguated record
Joerg Frederik Blumrich
Also filed as: BLUMRICH JOERG FREDERIK
3 granted patents·1 pending application·1 citations·filing 2017–2024
49Inventor score
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0178US2024152057A1Apparatus and method for characterizing a microlithographic maskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0270US11914303B2Apparatus and method for characterizing a microlithographic maskZEISS CARL SMT GMBH·Filed 2021·Granted Feb 27, 2024·0 cites·17 claims
- 0368US11774870B2Method for removing a particle from a mask systemZEISS CARL SMT GMBH·Filed 2022·Granted Oct 3, 2023·0 cites·24 claims
- 0459US10535132B2Method for determining a distance between a first structure element on a substrate and a second structure elementZEISS CARL SMT GMBH·Filed 2017·Granted Jan 14, 2020·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →