Inventor · disambiguated record
Joseph R. Breivogel
Also filed as: BREIVOGEL JOSEPH R
10 granted patents·1,574 citations·filing 1991–1997
94Inventor score
Top patents by PatentIndex Score
10 records- 0195US5762536ASensors for a linear polisherLAM RES CORP·Filed 1997·Granted Jun 9, 1998·150 cites·20 claims
- 0295US5554064AOrbital motion chemical-mechanical polishing apparatus and method of fabricationINTEL CORP·Filed 1993·Granted Sep 10, 1996·149 cites·46 claims
- 0395US5547417AMethod and apparatus for conditioning a semiconductor polishing padINTEL CORP·Filed 1994·Granted Aug 20, 1996·152 cites·19 claims
- 0495US5216843APolishing pad conditioning apparatus for wafer planarization processINTEL CORP·Filed 1992·Granted Jun 8, 1993·390 cites·16 claims
- 0594US5635083AMethod and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrateINTEL CORP·Filed 1995·Granted Jun 3, 1997·169 cites·4 claims
- 0693US5212910AComposite polishing pad for semiconductor processINTEL CORP·Filed 1991·Granted May 25, 1993·349 cites·30 claims
- 0790US5916012AControl of chemical-mechanical polishing rate across a substrate surface for a linear polisherLAM RES CORP·Filed 1997·Granted Jun 29, 1999·112 cites·15 claims
- 0887US5871390AMethod and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishingLAM RES CORP·Filed 1997·Granted Feb 16, 1999·75 cites·26 claims
- 0957US6095904AOrbital motion chemical-mechanical polishing method and apparatusINTEL CORP·Filed 1996·Granted Aug 1, 2000·17 cites·8 claims
- 1046US6083089AMethod and apparatus for chemical mechanical polishingINTEL CORP·Filed 1997·Granted Jul 4, 2000·11 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →