Inventor · disambiguated record
John Lang
Also filed as: LANG JOHN · LANG JOHN E
3 granted patents·1 pending application·176 citations·filing 1999–2002
77Inventor score
Technology areasH10P
Files withLAM RES CORP3
Top patents by PatentIndex Score
4 records- 0190US6383931B1Convertible hot edge ring to improve low-K dielectric etchLAM RES CORP·Filed 2000·Granted May 7, 2002·59 cites·17 claims
- 0285US6696366B1Technique for etching a low capacitance dielectric layerLAM RES CORP·Filed 1999·Granted Feb 24, 2004·86 cites·28 claims
- 0384US6653734B2Convertible hot edge ring to improve low-K dielectric etchLAM RES CORP·Filed 2002·Granted Nov 25, 2003·31 cites·19 claims
- 0424US2002132491A1Method of removing photoresist material with dimethyl sulfoxideFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →