Inventor · disambiguated record
Jonathan Liu
Also filed as: LIU JONATHAN · LIU JONATHAN TUN NAN
4 granted patents·1 pending application·23 citations·filing 2001–2013
72Inventor score
Top patents by PatentIndex Score
5 records- 0185US9161428B2Independent control of RF phases of separate coils of an inductively coupled plasma reactorAPPLIED MATERIALS INC·Filed 2013·Granted Oct 13, 2015·11 cites·17 claims
- 0284US9111722B2Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generatorAPPLIED MATERIALS INC·Filed 2013·Granted Aug 18, 2015·6 cites·20 claims
- 0380US9082591B2Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generatorAPPLIED MATERIALS INC·Filed 2013·Granted Jul 14, 2015·4 cites·20 claims
- 0445US6486819B2Circuitry with resistive input impedance for generating pulses from analog waveformsUNIV SINGAPORE·Filed 2001·Granted Nov 26, 2002·2 cites·16 claims
- 0543US2013284369A1Two-phase operation of plasma chamber by phase locked loopAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Jonathan Liu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →