Inventor · disambiguated record
Joshua Mark Lukens
Also filed as: LUKENS JOSHUA MARK
5 granted patents·2 pending applications·1 citations·filing 2019–2021
61Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0169US11240904B2Apparatus for and method of controlling coalescence of droplets in a droplet streamASML NETHERLANDS BV·Filed 2019·Granted Feb 1, 2022·1 cites·18 claims
- 0261US12452986B2Nozzle apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 21, 2025·0 cites·21 claims
- 0356US11690159B2Apparatus and method for extending target material delivery system lifetimeASML NETHERLANDS BV·Filed 2019·Granted Jun 27, 2023·0 cites·20 claims
- 0452US2023164900A1Apparatus for and method of accelerating droplets in a droplet generator for an euv sourceASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0550US12339214B2Apparatus for and method of monitoring droplets in a droplet streamASML NETHERLANDS BV·Filed 2020·Granted Jun 24, 2025·0 cites·26 claims
- 0635US11963285B2Target material control in an EUV light sourceASML NETHERLANDS BV·Filed 2020·Granted Apr 16, 2024·0 cites·40 claims
- 0735US2023010985A1Source material delivery system, euv radiation system, lithographic apparatus, and methods thereofASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →