Inventor · disambiguated record
Joel Ng
Also filed as: NG JOEL
7 granted patents·5 pending applications·23 citations·filing 2002–2025
79Inventor score
Top patents by PatentIndex Score
12 records- 0186US10692705B2Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamberTOKYO ELECTRON LTD·Filed 2016·Granted Jun 23, 2020·5 cites·23 claims
- 0275US2025283760A1Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0374US12306044B2Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 0473US7251036B2Beam splitter/combiner for optical metrology toolTHERMA WAVE INC·Filed 2006·Granted Jul 31, 2007·4 cites·16 claims
- 0565US7027158B2Beam splitter/combiner for optical meterology toolTHERMA WAVE INC·Filed 2002·Granted Apr 11, 2006·6 cites·27 claims
- 0663US12158374B2Time-resolved OES data collectionTOKYO ELECTRON LTD·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 0761US7154607B2Flat spectrum illumination source for optical metrologyTHERMA WAVE INC·Filed 2003·Granted Dec 26, 2006·8 cites·14 claims
- 0859US2025157801A1Sub-millisecond optical detection of pulsed plasma processesTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0958US2025293012A1System and method for semiconductor processingTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1056US12362158B2Method for OES data collection and endpoint detectionTOKYO ELECTRON LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 1155US2025283814A1Method for optical emission spectroscopy (oes) detector signal sensitivity improvementTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1254US2024339309A1Advanced OES CharacterizationTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →