Inventor · disambiguated record
Joerg Specht
Also filed as: SPECHT JOERG
2 granted patents·0 citations·filing 2016–2016
23Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0144US10018803B2Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangementZEISS CARL SMT GMBH·Filed 2016·Granted Jul 10, 2018·0 cites·20 claims
- 0242US10007195B2Device for determining a tilt angle of at least one mirror of a lithography system, and methodZEISS CARL SMT GMBH·Filed 2016·Granted Jun 26, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →