Inventor · disambiguated record
Joerg Tschischgale
Also filed as: TSCHISCHGALE JOERG
2 granted patents·4 pending applications·7 citations·filing 2005–2023
52Inventor score
Top patents by PatentIndex Score
6 records- 0180US7423765B2Optical system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Granted Sep 9, 2008·6 cites·23 claims
- 0256US7443484B2Method for exposing a semiconductor wafer by applying periodic movement to a componentINFINEON TECHNOLOGIES AG·Filed 2005·Granted Oct 28, 2008·1 cites·15 claims
- 0355US2024085800A1Projection exposure apparatus and method for designing a component of a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0435US2010052191A1Metrology Mark with Elements Arranged in a Matrix, Method of Manufacturing Same and Alignment MethodQIMONDA AG·Filed 2008·Application pending·0 cites
- 0535US2007229790A1Arrangement for the transfer of structural elements of a photomask onto a substrate and method thereforKUECHLER BERND·Filed 2007·Application pending·0 cites
- 0634US2009097001A1Non-Telecentric Lithography Apparatus and Method of Manufacturing Integrated CircuitsQIMONDA AG·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →