Inventor · disambiguated record
Joshua Chiu-Wing Tsui
Also filed as: TSUI JOSHUA · TSUI JOSHUA C W · TSUI JOSHUA CHIU-WING
12 granted patents·1,711 citations·filing 1992–2000
95Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC12
Top patents by PatentIndex Score
12 records- 0198US6054013AParallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion densityAPPLIED MATERIALS INC·Filed 1996·Granted Apr 25, 2000·596 cites·19 claims
- 0296US6077384APlasma reactor having an inductive antenna coupling power through a parallel plate electrodeAPPLIED MATERIALS INC·Filed 1996·Granted Jun 20, 2000·237 cites·67 claims
- 0396US6074512AInductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet linersAPPLIED MATERIALS INC·Filed 1997·Granted Jun 13, 2000·236 cites·101 claims
- 0495US6623596B1Plasma reactor having an inductive antenna coupling power through a parallel plate electrodeAPPLIED MATERIALS INC·Filed 2000·Granted Sep 23, 2003·84 cites·136 claims
- 0593US5350479AElectrostatic chuck for high power plasma processingAPPLIED MATERIALS INC·Filed 1992·Granted Sep 27, 1994·199 cites·32 claims
- 0690US6524432B1Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion densityAPPLIED MATERIALS INC·Filed 2000·Granted Feb 25, 2003·49 cites·72 claims
- 0789US6454898B1Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet linersAPPLIED MATERIALS INC·Filed 2000·Granted Sep 24, 2002·43 cites·28 claims
- 0882US5583737AElectrostatic chuck usable in high density plasmaAPPLIED MATERIALS INC·Filed 1995·Granted Dec 10, 1996·57 cites·14 claims
- 0980US5762714APlasma guard for chamber equipped with electrostatic chuckAPPLIED MATERIALS INC·Filed 1994·Granted Jun 9, 1998·68 cites·11 claims
- 1079US5800871AElectrostatic chuck with polymeric impregnation and method of makingAPPLIED MATERIALS INC·Filed 1996·Granted Sep 1, 1998·45 cites·15 claims
- 1179US5539609AElectrostatic chuck usable in high density plasmaAPPLIED MATERIALS INC·Filed 1993·Granted Jul 23, 1996·60 cites·15 claims
- 1276US5792562AElectrostatic chuck with polymeric impregnation and method of makingAPPLIED MATERIALS INC·Filed 1995·Granted Aug 11, 1998·37 cites·35 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →