Inventor · disambiguated record
Johannes Maria Van Benten
Also filed as: VAN BENTEN JOHANNES MARIA
1 granted patent·1 pending application·0 citations·filing 2011–2017
3Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0125US2013050674A1Lithographic apparatus, substrate table and device manufacturing methodPROSYENTSOV VITALIY·Filed 2011·Application pending·0 cites
- 0221US10520835B2Measurement system, calibration method, lithographic apparatus and positionerASML NETHERLANDS BV·Filed 2017·Granted Dec 31, 2019·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →