Inventor · disambiguated record
Joseph James Vegh
Also filed as: VEGH JOSEPH J · VEGH JOSEPH JAMES
2 granted patents·1 pending application·2 citations·filing 2012–2023
35Inventor score
Technology areasH10P
Files withLAM RES CORP3
Top patents by PatentIndex Score
3 records- 0156US8828744B2Method for etching with controlled wigglingLAM RES CORP·Filed 2012·Granted Sep 9, 2014·2 cites·18 claims
- 0252US2025118568A1Reduced temperature etching of doped silicon oxideLAM RES CORP·Filed 2023·Application pending·0 cites
- 0331US9484215B2Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etchLAM RES CORP·Filed 2015·Granted Nov 1, 2016·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →