Inventor · disambiguated record
Joachim Wienecke
Also filed as: WIENECKE JOACHIM
18 granted patents·4 pending applications·445 citations·filing 1995–2006
95Inventor score
Files withLEICA MICROSYSTEMS16VISTEC SEMICONDUCTOR SYSTEMS J2JENOPTIK TECHNOLOGIE GMBH1VISTEC SEMICONDUCTOR SYS GMBH1VISTEC SEMICONDUCTOR SYS JENA1
Top patents by PatentIndex Score
22 records- 0192US7152488B2System operating unitLEICA MICROSYSTEMS·Filed 2004·Granted Dec 26, 2006·94 cites·18 claims
- 0287US6456373B1Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrumentLEICA MICROSYSTEMS·Filed 2000·Granted Sep 24, 2002·54 cites·19 claims
- 0386US6962471B2Substrate conveying module and system made up of substrate conveying module and workstationLEICA MICROSYSTEMS·Filed 2001·Granted Nov 8, 2005·44 cites·11 claims
- 0485US6918735B2Holding device for wafersLEICA MICROSYSTEMS·Filed 2002·Granted Jul 19, 2005·51 cites·21 claims
- 0580US6920249B2Method and measuring instrument for determining the position of an edge of a pattern element on a substrateLEICA MICROSYSTEMS·Filed 2001·Granted Jul 19, 2005·50 cites·16 claims
- 0678US7489394B2Apparatus for inspecting a disk-like objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Feb 10, 2009·6 cites·4 claims
- 0778US6504608B2Optical measurement arrangement and method for inclination measurementLEICA MICROSYSTEMS·Filed 2000·Granted Jan 7, 2003·23 cites·24 claims
- 0868US7242467B2Method and apparatus for high-resolution defect location and classificationVISTEC SEMICONDUCTOR SYS JENA·Filed 2004·Granted Jul 10, 2007·10 cites·11 claims
- 0966US6941009B2Method for evaluating pattern defects on a water surfaceLEICA MICROSYSTEMS·Filed 2001·Granted Sep 6, 2005·13 cites·18 claims
- 1062US6826511B2Method and apparatus for the determination of layer thicknessesLEICA MICROSYSTEMS·Filed 2003·Granted Nov 30, 2004·12 cites·6 claims
- 1155US7041952B2Method for automatic focusing an imaging optical system on the surface of a sampleLEICA MICROSYSTEMS·Filed 2004·Granted May 9, 2006·7 cites·4 claims
- 1254US6713746B2Arrangement and method for illuminating a specimen field in an optical instrumentLEICA MICROSYSTEMS·Filed 2002·Granted Mar 30, 2004·5 cites·24 claims
- 1353US6618154B2Optical measurement arrangement, in particular for layer thickness measurementLEICA MICROSYSTEMS·Filed 2001·Granted Sep 9, 2003·7 cites·10 claims
- 1453US6075880AMethod for detection of defects in the inspection of structured surfacesJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Jun 13, 2000·48 cites·22 claims
- 1552US7084965B2Arrangement and method for inspecting unpatterned wafersVISTEC SEMICONDUCTOR SYSTEMS J·Filed 2002·Granted Aug 1, 2006·1 cites·21 claims
- 1646US6985237B2Method for determining layer thickness rangesLEICA MICROSYSTEMS·Filed 2003·Granted Jan 10, 2006·4 cites·2 claims
- 1746US6696679B1Method for focusing of disk-shaped objects with patterned surfaces during imagingLEICA MICROSYSTEMS·Filed 1998·Granted Feb 24, 2004·15 cites·9 claims
- 1845US7002740B2Setting module for the illumination of an optical instrumentLEICA MICROSYSTEMS·Filed 2002·Granted Feb 21, 2006·1 cites·16 claims
- 1941US2002024669A1Spectral ellipsometer having a refractive illuminating optical systemFiled 2001·Application pending·0 cites
- 2041US2002187035A1Arrangement for wafer inspectionLEICA MICROSYSTEMS·Filed 2002·Application pending·0 cites
- 2137US2006119366A1System for inspection of a disk-shaped objectLEICA MICROSYSTEMS·Filed 2005·Application pending·0 cites
- 2237US2007076943A1Method and apparatus for inspecting a waferVISTEC SEMICONDUCTOR SYSTEMS J·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →