Inventor · disambiguated record
Juergen Frosien
Also filed as: FROSIEN JUEERGEN · FROSIEN JUERGEN · FROSIEN JÜERGEN
44 granted patents·3 pending applications·711 citations·filing 1979–2015
98Inventor score
Files withINTEGRATED CIRCUIT TESTING19SIEMENS AG12APPLIED MATERIALS ISRAEL LTD4FROSIEN JUERGEN4APPLIED MATERIALS INC3
Top patents by PatentIndex Score
47 records- 0197US7544937B2Charged particle beam device for high spatial resolution and multiple perspective imagingINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Jun 9, 2009·37 cites·31 claims
- 0296US9153413B2Multi-beam scanning electron beam device and methods of using the sameALMOGY GILAD·Filed 2008·Granted Oct 6, 2015·57 cites·24 claims
- 0396US4926054AObjective lens for focusing charged particles in an electron microscopeINTEGRATED CIRCUIT TESTING·Filed 1989·Granted May 15, 1990·85 cites·8 claims
- 0495US7335894B2High current density particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 26, 2008·40 cites·27 claims
- 0595US4831266ADetector objective for particle beam apparatusSIEMENS AG·Filed 1987·Granted May 16, 1989·68 cites·22 claims
- 0691US4812651ASpectrometer objective for particle beam measuring instrumentsSIEMENS AG·Filed 1987·Granted Mar 14, 1989·46 cites·18 claims
- 0791US4785176AElectrostatic-magnetic lens for particle beam apparatusSIEMENS AG·Filed 1987·Granted Nov 15, 1988·48 cites·16 claims
- 0890US7439500B2Analyzing system and charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Oct 21, 2008·12 cites·27 claims
- 0990US4713543AScanning particle microscopeSIEMENS AG·Filed 1985·Granted Dec 15, 1987·47 cites·23 claims
- 1088US7465939B2Aberration correction device and method for operating sameINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Dec 16, 2008·10 cites·32 claims
- 1188US4985681AParticle beam measuring method for non-contact testing of interconnect networksSIEMENS AG·Filed 1985·Granted Jan 15, 1991·55 cites·16 claims
- 1288US4514638AElectron-optical system with variable-shaped beam for generating and measuring microstructuresSIEMENS AG·Filed 1984·Granted Apr 30, 1985·31 cites·17 claims
- 1383US7968855B2Dual mode gas field ion sourceINTEGRATED CIRCUIT TESTING·Filed 2009·Granted Jun 28, 2011·6 cites·25 claims
- 1483US7589328B2Gas field ION source for multiple applicationsINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Sep 15, 2009·6 cites·30 claims
- 1583US7427765B2Electron beam column for writing shaped electron beamsJEOL LTD·Filed 2005·Granted Sep 23, 2008·6 cites·18 claims
- 1682US7829870B2Method and apparatus for in-situ sample preparationINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 9, 2010·6 cites·9 claims
- 1781US7939800B2Arrangement and method for compensating emitter tip vibrationsINTEGRATED CIRCUIT TESTING·Filed 2008·Granted May 10, 2011·5 cites·28 claims
- 1881US7170068B2Method and system for discharging a sampleAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Jan 30, 2007·7 cites·19 claims
- 1980US7663102B2High current density particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 16, 2010·5 cites·34 claims
- 2080US7629578B2Charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Dec 8, 2009·5 cites·42 claims
- 2180US4675524AScanning particle microscope with diminished boersch effectSIEMENS AG·Filed 1986·Granted Jun 23, 1987·27 cites·20 claims
- 2279US7851768B2Ultra high precision measurement tool with control loopINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Dec 14, 2010·4 cites·19 claims
- 2379US7800075B2Multi-function module for an electron beam columnBULLER BENYAMIN·Filed 2008·Granted Sep 21, 2010·4 cites·12 claims
- 2476US8049180B2Achromatic mass separatorINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 1, 2011·4 cites·23 claims
- 2576US4808821ASpectrometer objective for electron beam mensuration techniquesSIEMENS AG·Filed 1986·Granted Feb 28, 1989·20 cites·10 claims
- 2674US7227155B2Electrostatic deflection system with impedance matching for high positioning accuracyAPPLIED MATERIALS INC·Filed 2005·Granted Jun 5, 2007·3 cites·20 claims
- 2772US7919749B2Energy filter for cold field emission electron beam apparatusINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 5, 2011·2 cites·25 claims
- 2870US7514682B2Electron anti-fogging baffle used as a detectorAPPLIED MATERIALS INC·Filed 2006·Granted Apr 7, 2009·2 cites·20 claims
- 2969US8158939B2High resolution gas field ion columnFROSIEN JUERGEN·Filed 2010·Granted Apr 17, 2012·2 cites·25 claims
- 3069US7675042B2Beam optical component for charged particle beamsINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Mar 9, 2010·7 cites·20 claims
- 3165US7838830B2Charged particle beam apparatus and method for operating a charged particle beam apparatusINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 23, 2010·1 cites·24 claims
- 3264US7592590B2Charged particle beam device with detection unit switch and method of operation thereofINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Sep 22, 2009·5 cites·16 claims
- 3362US10177048B2System for inspecting and reviewing a sampleAPPLIED MATERIALS ISRAEL LTD·Filed 2015·Granted Jan 8, 2019·1 cites·19 claims
- 3462US4677296AApparatus and method for measuring lengths in a scanning particle microscopeSIEMENS AG·Filed 1985·Granted Jun 30, 1987·18 cites·16 claims
- 3562US4335309AMethod and device for the rapid deflection of a particle beamSIEMENS AG·Filed 1980·Granted Jun 15, 1982·10 cites·4 claims
- 3660US4393308AHigh current electron sourceSIEMENS AG·Filed 1981·Granted Jul 12, 1983·10 cites·6 claims
- 3757US8026492B2Dual mode gas field ion sourceINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Sep 27, 2011·0 cites·24 claims
- 3853US2014175277A1Secondary electron optics and detection deviceLANIO STEFAN·Filed 2013·Application pending·0 cites
- 3952US8445846B2Beam optical component having a charged particle lensFROSIEN JUERGEN·Filed 2004·Granted May 21, 2013·2 cites·41 claims
- 4052US7947953B2Charged particle detection apparatus and detection methodINTEGRATED CIRCUIT TESTING·Filed 2008·Granted May 24, 2011·1 cites·23 claims
- 4152US4238680AMethod and device for setting and correcting errors of an electron optical condenser of a microprojectorSIEMENS AG·Filed 1979·Granted Dec 9, 1980·6 cites·7 claims
- 4251US8785849B2Ultra high precision measurement toolFROSIEN JUERGEN·Filed 2008·Granted Jul 22, 2014·0 cites·23 claims
- 4351US2011163229A1High throughput sem toolAPPLIED MATERIALS ISRAEL LTD·Filed 2008·Application pending·0 cites
- 4450US7315029B2Electrostatic deflection system with low aberrations and vertical beam incidenceAPPLIED MATERIALS INC·Filed 2005·Granted Jan 1, 2008·0 cites·19 claims
- 4549US8735847B2High resolution gas field ion column with reduced sample loadBANZHOF HELMUT·Filed 2008·Granted May 27, 2014·0 cites·9 claims
- 4647US9297692B2System and method for inspecting a sample using landing lensAPPLIED MATERIALS ISRAEL LTD·Filed 2013·Granted Mar 29, 2016·0 cites·20 claims
- 4739US2007138404A1Chamber with low electron stimulated desorptionFROSIEN JUERGEN·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →