Inventor · disambiguated record
Juergen Henrich
Also filed as: HENRICH JUERGEN
3 granted patents·5 pending applications·2 citations·filing 2007–2013
49Inventor score
Top patents by PatentIndex Score
8 records- 0167US9022715B2Load lock chamber designs for high-throughput processing systemAPPLIED MATERIALS INC·Filed 2013·Granted May 5, 2015·2 cites·12 claims
- 0254US2009217872A1Backside coating prevention device, coating chamber device for coating plate-shaped substrates, and method of coatingAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0350US2009218214A1Backside coating prevention device, coating chamber comprising a backside coating prevention device, and method of coatingAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 0445US7837796B2Process chamber, inline coating installation and method for treating a substrateAPPLIED MATERIALS INC·Filed 2007·Granted Nov 23, 2010·0 cites·19 claims
- 0545US2011104627A1Substrate transport system and methodAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0640US8869967B2Dynamic load lock with cellular structure for discrete substratesAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·0 cites·24 claims
- 0738US2013171757A1Advanced platform for passivating crystalline silicon solar cellsPONNEKANTI HARI K·Filed 2013·Application pending·0 cites
- 0837US2010095890A1Gas supply system, pumping system, coating system, gas supply method, and pumping methodAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →