Inventor · disambiguated record
Junya Minamida
Also filed as: MINAMIDA JUNYA
14 granted patents·1 pending application·41 citations·filing 2003–2022
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
15 records- 0185US8033244B2Substrate processing systemTOKYO ELECTRON LTD·Filed 2008·Granted Oct 11, 2011·12 cites·16 claims
- 0282US7485188B2Coating process method and coating process apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Feb 3, 2009·9 cites·20 claims
- 0381US10373849B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Aug 6, 2019·3 cites·13 claims
- 0481US10056269B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 21, 2018·6 cites·13 claims
- 0577US11404295B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 2, 2022·2 cites·16 claims
- 0673US8978670B2Substrate processing apparatusMINAMIDA JUNYA·Filed 2010·Granted Mar 17, 2015·4 cites·6 claims
- 0772US7918242B2Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control programTOKYO ELECTRON LTD·Filed 2007·Granted Apr 5, 2011·4 cites·15 claims
- 0864US9666463B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted May 30, 2017·1 cites·6 claims
- 0949US10128132B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Nov 13, 2018·0 cites·5 claims
- 1046US11998954B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Jun 4, 2024·0 cites·20 claims
- 1142US11670527B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 6, 2023·0 cites·15 claims
- 1242US9842747B2Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Dec 12, 2017·0 cites·8 claims
- 1341US10186433B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jan 22, 2019·0 cites·11 claims
- 1438US2003180444A1Coating process method and coating process apparatusFiled 2003·Application pending·0 cites
- 1536US8662811B2Substrate processing apparatusMINAMIDA JUNYA·Filed 2010·Granted Mar 4, 2014·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →