Inventor · disambiguated record

Julien Monbeig

Also filed as: MONBEIG JULIEN · MONBEIG JULIEN AUGUSTIN

0 granted patents·2 pending applications·0 citations·filing 2021–2022

Technology areasH01J H10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0153US2025140529A1Etch uniformity improvement in radical etch using confinement ringLAM RES CORP·Filed 2022·Application pending·0 cites
0249US2023298859A1Optimizing edge radical flux in a downstream plasma chamberLAM RES CORP·Filed 2021·Application pending·0 cites

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