Inventor · disambiguated record
Junya Oka
Also filed as: OKA Junya
2 granted patents·0 citations·filing 2017–2018
23Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0143US10968514B2Substrate mounting tableTOKYO ELECTRON LTD·Filed 2018·Granted Apr 6, 2021·0 cites·5 claims
- 0238US10738374B2Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Aug 11, 2020·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →