Inventor · disambiguated record
Jui-Chun Peng
Also filed as: PENG JUI-CHUN
26 granted patents·2 pending applications·56 citations·filing 2009–2025
93Inventor score
Top patents by PatentIndex Score
28 records- 0198US9841687B2Synchronized integrated metrology for overlay-shift reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 12, 2017·28 cites·20 claims
- 0282US10747128B2Exposure method and exposure apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 18, 2020·3 cites·20 claims
- 0381US12282318B2Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 22, 2025·0 cites·20 claims
- 0481US11500299B2Exposure method and exposure apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 15, 2022·1 cites·20 claims
- 0580US8616539B2Track spin wafer chuckTSENG WEI-HSIANG·Filed 2011·Granted Dec 31, 2013·8 cites·17 claims
- 0678US9123583B2Overlay abnormality gating by Z dataTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 1, 2015·4 cites·20 claims
- 0777US9826615B2EUV collector with orientation to avoid contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 21, 2017·3 cites·20 claims
- 0877US2025216841A1Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0972US11768484B2Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 26, 2023·0 cites·20 claims
- 1070US9081297B2Lithography apparatus having dual reticle edge masking assemblies and method of useWU TUNG-LI·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 1166US9658536B2In-line inspection and clean for immersion lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 23, 2017·1 cites·20 claims
- 1266US8955530B2System and method for cleaning a wafer chuckPENG JUI-CHUN·Filed 2011·Granted Feb 17, 2015·2 cites·9 claims
- 1364US11162777B2Wafer alignment mark schemeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 2, 2021·0 cites·20 claims
- 1463US9640487B2Wafer alignment mark schemeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted May 2, 2017·1 cites·20 claims
- 1559US9632426B2In-situ immersion hood cleaningPENG JUI-CHUN·Filed 2011·Granted Apr 25, 2017·1 cites·20 claims
- 1658US10514247B2Wafer alignment mark schemeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·0 cites·20 claims
- 1758US9863754B2Wafer alignment mark schemeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 9, 2018·0 cites·21 claims
- 1853US11153957B2Apparatus and method for generating an electromagnetic radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 19, 2021·0 cites·20 claims
- 1953US9709904B2Lithography apparatus having dual reticle edge masking assemblies and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 18, 2017·0 cites·20 claims
- 2050US9587929B2Focus metrology method and photolithography method and systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Mar 7, 2017·0 cites·20 claims
- 2149US9781773B2Method of heating/cooling a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 3, 2017·0 cites·20 claims
- 2247US8237132B2Method and apparatus for reducing down time of a lithography systemPENG JUI-CHUN·Filed 2009·Granted Aug 7, 2012·2 cites·20 claims
- 2346US10061215B2Patterning method and patterning apparatus for fabricating a resist patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 28, 2018·0 cites·20 claims
- 2446US9228827B2Flexible wafer leveling design for various orientation of line/trenchTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 5, 2016·0 cites·20 claims
- 2546US2013258339A1Wafer alignment mark schemeTSENG WEI-HSIANG·Filed 2012·Application pending·0 cites
- 2645US8338262B2Dual wavelength exposure method and system for semiconductor device manufacturingLEE HENG-JEN·Filed 2009·Granted Dec 25, 2012·0 cites·14 claims
- 2743US9282592B2Rotatable heating-cooling plate and element in proximity theretoPENG JUI-CHUN·Filed 2010·Granted Mar 8, 2016·0 cites·20 claims
- 2838US9978625B2Semiconductor method and associated apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 22, 2018·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Jui-Chun Peng files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →