Inventor · disambiguated record
Juline Shoeb
Also filed as: SHOEB JULINE
18 granted patents·4 pending applications·45 citations·filing 2015–2024
92Inventor score
Files withLAM RES CORP22
Top patents by PatentIndex Score
22 records- 0194US10224183B1Multi-level parameter and frequency pulsing with a low angular spreadLAM RES CORP·Filed 2018·Granted Mar 5, 2019·12 cites·30 claims
- 0293US10573494B2Multi-level parameter and frequency pulsing with a low angular spreadLAM RES CORP·Filed 2019·Granted Feb 25, 2020·8 cites·20 claims
- 0390US10580618B2Multi-level pulsing of DC and RF signalsLAM RES CORP·Filed 2019·Granted Mar 3, 2020·4 cites·25 claims
- 0490US10386828B2Methods and apparatuses for etch profile matching by surface kinetic model optimizationLAM RES CORP·Filed 2015·Granted Aug 20, 2019·8 cites·33 claims
- 0590US10304660B1Multi-level pulsing of DC and RF signalsLAM RES CORP·Filed 2018·Granted May 28, 2019·5 cites·41 claims
- 0689US11462390B2Multi-level parameter and frequency pulsing with a low angular spreadLAM RES CORP·Filed 2020·Granted Oct 4, 2022·2 cites·23 claims
- 0786US12283461B2Systems and methods for achieving peak ion energy enhancement with a low angular spreadLAM RES CORP·Filed 2024·Granted Apr 22, 2025·0 cites·20 claims
- 0886US10395894B2Systems and methods for achieving peak ion energy enhancement with a low angular spreadLAM RES CORP·Filed 2017·Granted Aug 27, 2019·3 cites·28 claims
- 0983US12494345B2Pulsing RF coils of a plasma chamber in reverse synchronizationLAM RES CORP·Filed 2021·Granted Dec 9, 2025·1 cites·20 claims
- 1081US12068131B2Multi-level parameter and frequency pulsing with a low angular spreadLAM RES CORP·Filed 2022·Granted Aug 20, 2024·0 cites·25 claims
- 1181US11915912B2Systems and methods for achieving peak ion energy enhancement with a low angular spreadLAM RES CORP·Filed 2022·Granted Feb 27, 2024·0 cites·20 claims
- 1278US11049693B2Systems and methods for achieving peak ion energy enhancement with a low angular spreadLAM RES CORP·Filed 2019·Granted Jun 29, 2021·1 cites·18 claims
- 1376US11569067B2Systems and methods for achieving peak ion energy enhancement with a low angular spreadLAM RES CORP·Filed 2021·Granted Jan 31, 2023·0 cites·21 claims
- 1475US2024355636A1Selective silicon dioxide removal using low pressure low bias deuterium plasmaLAM RES CORP·Filed 2024·Application pending·0 cites
- 1572US12119232B2Etching isolation features and dense features within a substrateLAM RES CORP·Filed 2022·Granted Oct 15, 2024·0 cites·20 claims
- 1670US10755896B2Multi-level pulsing of DC and RF signalsLAM RES CORP·Filed 2020·Granted Aug 25, 2020·0 cites·21 claims
- 1769US11011351B2Monoenergetic ion generation for controlled etchLAM RES CORP·Filed 2018·Granted May 18, 2021·1 cites·13 claims
- 1865US12057319B2Selective silicon dioxide removal using low pressure low bias deuterium plasmaLAM RES CORP·Filed 2020·Granted Aug 6, 2024·0 cites·13 claims
- 1961US11398387B2Etching isolation features and dense features within a substrateLAM RES CORP·Filed 2019·Granted Jul 26, 2022·0 cites·19 claims
- 2056US2025259821A1Method to enhance etch rate and improve critical dimension of features and mask selectivityLAM RES CORP·Filed 2023·Application pending·0 cites
- 2154US2025046572A1A method and apparatus for enhancing ion energy and reducing ion energy spread in an inductively coupled plasmaLAM RES CORP·Filed 2022·Application pending·0 cites
- 2250US2023352272A1Systems for controlling plasma density distribution profiles including multi-rf zoned substrate supportsLAM RES CORP·Filed 2021·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Juline Shoeb files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →