Inventor · disambiguated record
Jungwan Sung
Also filed as: SUNG JUNGWAN
3 granted patents·640 citations·filing 2002–2004
81Inventor score
Technology areasH10P
Files withNOVELLUS SYSTEMS INC3
Top patents by PatentIndex Score
3 records- 0197US7144806B1ALD of tantalum using a hydride reducing agentNOVELLUS SYSTEMS INC·Filed 2002·Granted Dec 5, 2006·312 cites·20 claims
- 0297US6844258B1Selective refractory metal and nitride cappingNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·260 cites·55 claims
- 0393US7157798B1Selective refractory metal and nitride cappingNOVELLUS SYSTEMS INC·Filed 2004·Granted Jan 2, 2007·68 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →