Inventor · disambiguated record
Junghwan Sung
Also filed as: SUNG JUNGHWAN
6 granted patents·664 citations·filing 2002–2005
89Inventor score
Files withNOVELLUS SYSTEMS INC6
Top patents by PatentIndex Score
6 records- 0198US7691749B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 6, 2010·97 cites·18 claims
- 0297US7141494B2Method for reducing tungsten film roughness and improving step coverageNOVELLUS SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·147 cites·32 claims
- 0397US7005372B2Deposition of tungsten nitrideNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 28, 2006·187 cites·46 claims
- 0495US7262125B2Method of forming low-resistivity tungsten interconnectsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 28, 2007·91 cites·32 claims
- 0594US7107998B2Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatusNOVELLUS SYSTEMS INC·Filed 2003·Granted Sep 19, 2006·74 cites·27 claims
- 0694US6905543B1Methods of forming tungsten nucleation layerNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 14, 2005·68 cites·34 claims
Join the waitlist — get patent alerts
Get an alert when Junghwan Sung files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →