Inventor · disambiguated record
Jun Yamashima
Also filed as: YAMASHIMA JUN
5 granted patents·113 citations·filing 1994–2017
80Inventor score
Top patents by PatentIndex Score
5 records- 0183US10472717B2Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Nov 12, 2019·6 cites·21 claims
- 0281US5524865ADiaphragm valve structureMOTOYAMA ENG WORKS·Filed 1994·Granted Jun 11, 1996·45 cites·20 claims
- 0377US5653419ADiaphragm type high pressure shut-off valveMOTOYAMA ENG WORKS·Filed 1994·Granted Aug 5, 1997·40 cites·13 claims
- 0461US6105933ADiaphragm valve structureMOTOYAMA ENG WORKS·Filed 1995·Granted Aug 22, 2000·22 cites·1 claims
- 0539US10316835B2Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →