Inventor · disambiguated record
K. Y. Ramanujam
Also filed as: RAMANUJAM K Y
3 granted patents·2 pending applications·194 citations·filing 1996–2008
72Inventor score
Top patents by PatentIndex Score
5 records- 0193US8622021B2High lifetime consumable silicon nitride-silicon dioxide plasma processing componentsTAYLOR TRAVIS R·Filed 2008·Granted Jan 7, 2014·172 cites·8 claims
- 0252US5714037AMethod of improving adhesion between thin filmsMICROUNITY SYSTEMS ENG·Filed 1996·Granted Feb 3, 1998·22 cites·6 claims
- 0337US2002185467A1Interlocking chemical mechanical polishing systemLAM RES CORP·Filed 2002·Application pending·0 cites
- 0436US2003060145A1Multi-step polishing system and process of using sameFiled 2001·Application pending·0 cites
- 0534US7040952B1Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization processLAM RES CORP·Filed 2002·Granted May 9, 2006·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →