Inventor · disambiguated record
Kazutsugu Aoki
Also filed as: AOKI KAZUTSUGU
7 granted patents·373 citations·filing 1989–2003
87Inventor score
Top patents by PatentIndex Score
7 records- 0192US6111225AWafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressuresTOKYO ELECTRON LTD·Filed 1997·Granted Aug 29, 2000·181 cites·14 claims
- 0283US6121579AHeating apparatus, and processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Sep 19, 2000·81 cites·37 claims
- 0379US5352902AMethod for controlling plasma surface-treatments with a plurality of photodetectors and optical filtersTOKYO ELECTRON LTD·Filed 1993·Granted Oct 4, 1994·38 cites·15 claims
- 0478US5938850ASingle wafer heat treatment apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Aug 17, 1999·57 cites·11 claims
- 0551US7169283B2Anodization device and anodization methodTOKYO ELECTRON LTD·Filed 2003·Granted Jan 30, 2007·3 cites·16 claims
- 0649US4954684AVertical type heat-treating apparatus and heat-treating methodTEL SAGAMI LTD·Filed 1989·Granted Sep 4, 1990·12 cites·8 claims
- 0747US7118663B2Anodic oxidizer, anodic oxidation methodTOKYO ELECTRON LTD·Filed 2002·Granted Oct 10, 2006·1 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →