Inventor · disambiguated record
Katsumi Asada
Also filed as: ASADA KATSUMI
12 granted patents·2 pending applications·328 citations·filing 1976–2015
92Inventor score
Top patents by PatentIndex Score
14 records- 0197US5504407AStage driving systemCANON KK·Filed 1993·Granted Apr 2, 1996·152 cites·10 claims
- 0293US7443619B2Optical element holding apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Oct 28, 2008·22 cites·8 claims
- 0387US7224432B2Stage device, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted May 29, 2007·12 cites·15 claims
- 0484US7859643B2Apparatus for moving curved-surface mirror, exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Dec 28, 2010·14 cites·9 claims
- 0583US7771065B2Optical unit and exposure apparatus having the sameCANON KK·Filed 2006·Granted Aug 10, 2010·7 cites·11 claims
- 0683US5909272AStage and exposure apparatus using sameCANON KK·Filed 1997·Granted Jun 1, 1999·53 cites·24 claims
- 0778US9052614B2Vibration control apparatus, lithography apparatus, and method of manufacturing articleNAWATA RYO·Filed 2011·Granted Jun 9, 2015·6 cites·18 claims
- 0878US5511930APrecision positioning apparatusCANON KK·Filed 1993·Granted Apr 30, 1996·49 cites·6 claims
- 0959US7453623B2Reflecting mirror and exposure apparatus using the sameCANON KK·Filed 2006·Granted Nov 18, 2008·2 cites·15 claims
- 1053US7297981B2Electro-optical device having a light-shielding film comprising alternating layers of silicide and nitrided silicideSEIKO EPSON CORP·Filed 2004·Granted Nov 20, 2007·1 cites·9 claims
- 1147US9678444B2Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted Jun 13, 2017·0 cites·34 claims
- 1247US4011185AAqueous insulating varnishesSHOWA ELECTRIC WIRE & CABLE CO·Filed 1976·Granted Mar 8, 1977·10 cites·22 claims
- 1335US2012045723A1Vibration isolation device, exposure apparatus, and device manufacturing method using sameNAWATA RYO·Filed 2011·Application pending·0 cites
- 1434US2004007219A1Power generation deviceFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →