Inventor · disambiguated record
Kang-Lie Chiang
Also filed as: CHIANG KANG-LIE · MILLER MATTHEW L
15 granted patents·4 pending applications·751 citations·filing 1999–2019
95Inventor score
Top patents by PatentIndex Score
19 records- 0199US6900596B2Capacitively coupled plasma reactor with uniform radial distribution of plasmaAPPLIED MATERIALS INC·Filed 2002·Granted May 31, 2005·224 cites·53 claims
- 0298US6586886B1Gas distribution plate electrode for a plasma reactorAPPLIED MATERIALS INC·Filed 2001·Granted Jul 1, 2003·115 cites·46 claims
- 0396US7030335B2Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2001·Granted Apr 18, 2006·72 cites·125 claims
- 0496US6894245B2Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2001·Granted May 17, 2005·108 cites·31 claims
- 0590US7132618B2MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2003·Granted Nov 7, 2006·43 cites·35 claims
- 0690US6921727B2Method for modifying dielectric characteristics of dielectric layersAPPLIED MATERIALS INC·Filed 2003·Granted Jul 26, 2005·61 cites·35 claims
- 0789US7186943B2MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2005·Granted Mar 6, 2007·12 cites·20 claims
- 0887US10770321B2Process kit erosion and service life predictionAPPLIED MATERIALS INC·Filed 2019·Granted Sep 8, 2020·4 cites·17 claims
- 0987US6677712B2Gas distribution plate electrode for a plasma receptorAPPLIED MATERIALS INC·Filed 2003·Granted Jan 13, 2004·22 cites·14 claims
- 1086US10177018B2Process kit erosion and service life predictionAPPLIED MATERIALS INC·Filed 2017·Granted Jan 8, 2019·4 cites·17 claims
- 1173US7981812B2Methods for forming ultra thin structures on a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jul 19, 2011·4 cites·20 claims
- 1273US6323132B1Etching methods for anisotropic platinum profileAPPLIED MATERIALS INC·Filed 1999·Granted Nov 27, 2001·36 cites·27 claims
- 1372US6368517B1Method for preventing corrosion of a dielectric materialAPPLIED MATERIALS INC·Filed 1999·Granted Apr 9, 2002·41 cites·32 claims
- 1459US9281190B2Local and global reduction of critical dimension (CD) asymmetry in etch processingCHIANG KANG-LIE·Filed 2014·Granted Mar 8, 2016·1 cites·8 claims
- 1556US6749770B2Method of etching an anisotropic profile in platinumFiled 2001·Granted Jun 15, 2004·4 cites·19 claims
- 1645US2009293907A1Method of substrate polymer removalFUNG NANCY·Filed 2008·Application pending·0 cites
- 1738US2004040664A1Cathode pedestal for a plasma etch reactorFiled 2003·Application pending·0 cites
- 1837US2001050267A1Method for allowing a stable power transmission into a plasma processing chamberFiled 2001·Application pending·0 cites
- 1933US2006102197A1Post-etch treatment to remove residuesCHIANG KANG-LIE·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →