Inventor · disambiguated record
Kai-Lin Chuang
Also filed as: CHUANG KAI-LIN
17 granted patents·8 pending applications·11 citations·filing 2011–2025
88Inventor score
Top patents by PatentIndex Score
25 records- 0195US11764094B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 19, 2023·2 cites·20 claims
- 0286US8748066B2Method for forming photomasksUNITED MICROELECTRONICS CORP·Filed 2012·Granted Jun 10, 2014·4 cites·19 claims
- 0383US2025096022A1Nozzle having real time inspection functionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0481US12087611B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0579US2025344472A1Transistor source/drain regions and methods of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0679US2025351482A1Semiconductor Device Structure and Method for Forming the SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0778US2024379401A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0877US12191175B2Nozzle having real time inspection functionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
- 0974US2024379875A1Semiconductor device structure and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1072US12336226B2Semiconductor device structure including stacked nanostructuresTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 17, 2025·0 cites·20 claims
- 1172US2024387212A1Apparatus and methods for determining fluid dynamics of liquid film on wafer surfaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1270US9316901B2Method for forming patternsUNITED MICROELECTRONICS CORP·Filed 2014·Granted Apr 19, 2016·1 cites·19 claims
- 1368US12484246B2Method of manufacturing a semiconductor device including forming a sidewall spacer on a sidewall of a channel structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 1468US10504758B2Nozzle having real time inspection functionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 10, 2019·1 cites·18 claims
- 1568US2023420520A1Transistor Source/Drain Regions and Methods of Forming the SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1667US8954919B1Calculation method for generating layout pattern in photomaskUNITED MICROELECTRONICS CORP·Filed 2013·Granted Feb 10, 2015·2 cites·20 claims
- 1767US2023384211A1In-situ apparatus for detecting abnormality in process tubeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1865US11355370B2Nozzle having real time inspection functionsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 7, 2022·0 cites·7 claims
- 1961US12326397B2In-situ apparatus for detecting abnormality in process tubeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 10, 2025·0 cites·20 claims
- 2061US12272576B2Apparatus and methods for determining fluid dynamics of liquid film on wafer surfaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 8, 2025·0 cites·20 claims
- 2158US8729716B2Alignment accuracy markCHUANG KAI-LIN·Filed 2011·Granted May 20, 2014·1 cites·6 claims
- 2254US11107671B2Method of processing semiconductor substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·20 claims
- 2353US9304389B2Photomask and fabrication method thereofUNITED MICROELECTRONICS CORP·Filed 2013·Granted Apr 5, 2016·0 cites·20 claims
- 2446US9274416B2Method for forming photo-mask and OPC methodUNITED MICROELECTRONICS CORP·Filed 2013·Granted Mar 1, 2016·0 cites·10 claims
- 2544US10269557B2Apparatus of processing semiconductor substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 23, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →