Inventor · disambiguated record
Kazuhiko Fukazawa
Also filed as: FUKAZAWA KAZUHIKO
28 granted patents·8 pending applications·185 citations·filing 1995–2015
96Inventor score
Top patents by PatentIndex Score
36 records- 0192US8705034B2Evaluation device and evaluation methodNIKON CORP·Filed 2012·Granted Apr 22, 2014·8 cites·19 claims
- 0290US7298471B2Surface inspection apparatus and surface inspection methodNIKON CORP·Filed 2006·Granted Nov 20, 2007·12 cites·14 claims
- 0389US7643137B2Defect inspection apparatus, defect inspection method and method of inspecting hole patternNIKON CORP·Filed 2005·Granted Jan 5, 2010·15 cites·8 claims
- 0486US7369224B2Surface inspection apparatus, surface inspection method and exposure systemNIKON CORP·Filed 2005·Granted May 6, 2008·13 cites·23 claims
- 0584US10359367B2Inspection apparatus and inspection methodNIKON CORP·Filed 2012·Granted Jul 23, 2019·4 cites·32 claims
- 0684US7372557B2Surface defect inspection apparatus and surface defect inspection methodNIKON CORP·Filed 2006·Granted May 13, 2008·9 cites·23 claims
- 0783US8334977B2Evaluation device and evaluation methodFUKAZAWA KAZUHIKO·Filed 2011·Granted Dec 18, 2012·4 cites·22 claims
- 0882US9964497B2Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor deviceNIKON CORP·Filed 2014·Granted May 8, 2018·3 cites·14 claims
- 0982US7692780B2Surface inspecting apparatusNIKON CORP·Filed 2008·Granted Apr 6, 2010·8 cites·11 claims
- 1082US6693293B2Surface inspection apparatus using radiation or lightNIKON CORP·Filed 2001·Granted Feb 17, 2004·22 cites·10 claims
- 1177US8446578B2Defect inspection apparatus, defect inspection method and method of inspecting hole patternSUGIHARA MARI·Filed 2009·Granted May 21, 2013·5 cites·7 claims
- 1277US7557912B2Defect inspection apparatus and defect inspection methodNIKON CORP·Filed 2008·Granted Jul 7, 2009·4 cites·15 claims
- 1376US6646735B2Surface inspection apparatus and surface inspection methodNIKON CORP·Filed 2001·Granted Nov 11, 2003·14 cites·26 claims
- 1472US6654113B2Surface inspection apparatusNIKON CORP·Filed 2001·Granted Nov 25, 2003·10 cites·11 claims
- 1572US5646403AScanning electron microscopeNIKON CORP·Filed 1995·Granted Jul 8, 1997·22 cites·1 claims
- 1671US7697139B2Surface inspection apparatusNIKON CORP·Filed 2008·Granted Apr 13, 2010·2 cites·9 claims
- 1769US8945954B2Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor deviceFUKAZAWA KAZUHIKO·Filed 2011·Granted Feb 3, 2015·1 cites·8 claims
- 1869US8687182B2Surface inspection apparatus and surface inspection methodNIKON CORP·Filed 2012·Granted Apr 1, 2014·1 cites·17 claims
- 1968US7330042B2Substrate inspection system, substrate inspection method, and substrate inspection apparatusNIKON CORP·Filed 2004·Granted Feb 12, 2008·12 cites·6 claims
- 2066US10352875B2Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor deviceFUKAZAWA KAZUHIKO·Filed 2011·Granted Jul 16, 2019·2 cites·33 claims
- 2164US9240356B2Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor deviceFUKAZAWA KAZUHIKO·Filed 2011·Granted Jan 19, 2016·1 cites·12 claims
- 2260US5780853AScanning electron microscopeNIKON CORP·Filed 1996·Granted Jul 14, 1998·13 cites·7 claims
- 2356US7834993B2Surface inspection apparatus and surface inspection methodNIKON CORP·Filed 2007·Granted Nov 16, 2010·0 cites·29 claims
- 2453US10274835B2Evaluation method and device, processing method, and exposure systemNIKON CORP·Filed 2013·Granted Apr 30, 2019·0 cites·21 claims
- 2553US9322788B2Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor deviceNIKON CORP·Filed 2015·Granted Apr 26, 2016·0 cites·9 claims
- 2653US7990535B2Surface state detecting apparatusNIKON CORP·Filed 2010·Granted Aug 2, 2011·0 cites·15 claims
- 2753US2006238754A1Defect inspection apparatus and defect inspection methodNIKON CORP·Filed 2006·Application pending·0 cites
- 2851US8441627B2Surface inspection apparatus and surface inspection methodFUKAZAWA KAZUHIKO·Filed 2010·Granted May 14, 2013·0 cites·14 claims
- 2949US8223328B2Surface inspecting apparatus and surface inspecting methodFUKAZAWA KAZUHIKO·Filed 2011·Granted Jul 17, 2012·0 cites·15 claims
- 3048US2009315988A1Observation device, inspection device and inspection methodFUKAZAWA KAZUHIKO·Filed 2009·Application pending·0 cites
- 3146US2010321677A1Surface inspecting apparatus and surface inspecting methodNIKON CORP·Filed 2010·Application pending·0 cites
- 3245US2004239918A1Defect inspection apparatus, defect inspection method and method of inspecting hole patternNIKON CORP·Filed 2004·Application pending·0 cites
- 3344US2008246966A1Surface-Inspecting Apparatus and Surface-Inspecting MethodNIKON CORP·Filed 2006·Application pending·0 cites
- 3444US2003057384A1Method of detecting flaw and apparatus for detecting flawNIKON CORP·Filed 2002·Application pending·0 cites
- 3544US2015356726A1Inspection apparatus, inspection method, exposure system, exposure method, and device manufacturing methodNIKON CORP·Filed 2013·Application pending·0 cites
- 3635US2011254946A1Surface inspection deviceNIKON CORP·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →