Inventor · disambiguated record
Kazuya Fukuhara
Also filed as: FUKUHARA KAZUYA
66 granted patents·26 pending applications·245 citations·filing 2003–2024
98Inventor score
Top patents by PatentIndex Score
92 records- 0197US7386830B2Method for designing an illumination light source, method for designing a mask pattern, method for manufacturing a photomask, method for manufacturing a semiconductor device and a computer program productTOSHIBA KK·Filed 2005·Granted Jun 10, 2008·36 cites·18 claims
- 0292US7436491B2Exposure system, exposure method and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2005·Granted Oct 14, 2008·15 cites·20 claims
- 0391US12078925B2Imprint apparatus and imprint methodKIOXIA CORP·Filed 2022·Granted Sep 3, 2024·1 cites·18 claims
- 0490US8122385B2Mask pattern correcting methodFUKUHARA KAZUYA·Filed 2008·Granted Feb 21, 2012·13 cites·24 claims
- 0589US8778572B2Photomask and pattern forming methodFUKUHARA KAZUYA·Filed 2012·Granted Jul 15, 2014·6 cites·19 claims
- 0688US7685556B2Mask data correction method, photomask manufacturing method, computer program, optical image prediction method, resist pattern shape prediction method, and semiconductor device manufacturing methodTOSHIBA KK·Filed 2005·Granted Mar 23, 2010·10 cites·17 claims
- 0788US7327436B2Method for evaluating a local flare, correction method for a mask pattern, manufacturing method for a semiconductor device and a computer program productTOSHIBA KK·Filed 2005·Granted Feb 5, 2008·12 cites·20 claims
- 0887US7446853B2Exposure method, exposure tool and method of manufacturing a semiconductor deviceTOSHIBA KK·Filed 2005·Granted Nov 4, 2008·9 cites·9 claims
- 0986US8373258B2Semiconductor device and production method thereofRENESAS ELECTRONICS CORP·Filed 2011·Granted Feb 12, 2013·16 cites·12 claims
- 1084US8407628B2Photomask manufacturing method and semiconductor device manufacturing methodITOH MASAMITSU·Filed 2010·Granted Mar 26, 2013·3 cites·10 claims
- 1184US7925090B2Method of determining photo mask, method of manufacturing semiconductor device, and computer program productTOSHIBA KK·Filed 2006·Granted Apr 12, 2011·7 cites·14 claims
- 1282US8294889B2Method for inspecting nano-imprint templateKASHIWAGI HIROYUKI·Filed 2010·Granted Oct 23, 2012·5 cites·7 claims
- 1381US11004683B2Imprint apparatus, imprint method, and method of manufacturing semiconductor deviceTOSHIBA MEMORY CORP·Filed 2018·Granted May 11, 2021·2 cites·16 claims
- 1481US7904851B2Photomask manufacturing method and semiconductor device manufacturing methodTOSHIBA KK·Filed 2007·Granted Mar 8, 2011·4 cites·10 claims
- 1580US11333970B2Imprint device, imprint method and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2019·Granted May 17, 2022·2 cites·21 claims
- 1680US8293456B2Semiconductor device manufacturing methodFUKUHARA KAZUYA·Filed 2009·Granted Oct 23, 2012·5 cites·7 claims
- 1780US7586605B2Method for testing a polarization state, method for manufacturing a semiconductor device, and test substrate for testing a polarization stateTOSHIBA KK·Filed 2006·Granted Sep 8, 2009·5 cites·21 claims
- 1879US8072601B2Pattern monitor mark and monitoring method suitable for micropatternFUKUHARA KAZUYA·Filed 2008·Granted Dec 6, 2011·7 cites·9 claims
- 1979US7716628B2System, method and program for generating mask data, exposure mask and semiconductor device in consideration of optical proximity effectsTOSHIBA KK·Filed 2005·Granted May 11, 2010·5 cites·15 claims
- 2078US8419950B2Pattern forming methodKASHIWAGI HIROYUKI·Filed 2010·Granted Apr 16, 2013·3 cites·10 claims
- 2176US7676078B2Inspection method, processor and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2004·Granted Mar 9, 2010·13 cites·20 claims
- 2275US7691542B2Exposure system, test mask for flare testing, method for evaluating lithography process, method for evaluating exposure tools, method for generating corrected mask pattern, and method for manufacturing semiconductor deviceTOSHIBA KK·Filed 2005·Granted Apr 6, 2010·4 cites·15 claims
- 2373US8584054B2Photomask manufacturing method and semiconductor device manufacturing methodTOSHIBA KK·Filed 2013·Granted Nov 12, 2013·2 cites·10 claims
- 2472US7517621B2Exposure method and method for manufacturing semiconductor deviceTOSHIBA KK·Filed 2007·Granted Apr 14, 2009·3 cites·20 claims
- 2570US7440104B2Exposure system, test mask for monitoring polarization, and method for monitoring polarizationTOSHIBA KK·Filed 2005·Granted Oct 21, 2008·3 cites·18 claims
- 2669US7803502B2Photomask and method of manufacturing semiconductor device using the photomaskTOSHIBA KK·Filed 2007·Granted Sep 28, 2010·2 cites·17 claims
- 2769US7692769B2Exposure apparatus, exposure method, and semiconductor device manufacturing methodTOSHIBA KK·Filed 2006·Granted Apr 6, 2010·2 cites·20 claims
- 2868US8772179B2Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor deviceFUKUHARA KAZUYA·Filed 2012·Granted Jul 8, 2014·2 cites·16 claims
- 2968US7807323B2Exposure condition setting method, semiconductor device manufacturing method, and exposure condition setting programTOSHIBA KK·Filed 2007·Granted Oct 5, 2010·2 cites·20 claims
- 3065US7556896B2Inspection method and photomaskTOSHIBA KK·Filed 2006·Granted Jul 7, 2009·1 cites·18 claims
- 3165US7072040B2Mask for inspecting an exposure apparatus, a method of inspecting an exposure apparatus, and an exposure apparatusTOSHIBA KK·Filed 2004·Granted Jul 4, 2006·7 cites·20 claims
- 3265US6839132B2Aberration measuring method of projection optical systemTOKYO SHIBAURA ELECTRIC CO·Filed 2003·Granted Jan 4, 2005·9 cites·18 claims
- 3364US11837469B2Imprint apparatus, imprint method, and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2021·Granted Dec 5, 2023·0 cites·16 claims
- 3463US8085393B2Exposure apparatus inspection method and method for manufacturing semiconductor deviceKASA KENTARO·Filed 2009·Granted Dec 27, 2011·2 cites·21 claims
- 3563US2025291244A1Method of generating drop recipe, imprinting method, and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2024·Application pending·0 cites
- 3662US12386254B2Template, method for manufacturing template, and method for manufacturing semiconductor deviceKIOXIA CORP·Filed 2022·Granted Aug 12, 2025·0 cites·20 claims
- 3762US2024427234A1Imprint method and method for manufacturing semiconductor deviceKIOXIA CORP·Filed 2024·Application pending·0 cites
- 3861US7148138B2Method of forming contact hole and method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2004·Granted Dec 12, 2006·9 cites·20 claims
- 3959US8142960B2Exposure method, mask data producing method, and semiconductor device manufacturing methodNAGAI SATOSHI·Filed 2009·Granted Mar 27, 2012·1 cites·7 claims
- 4059US7186485B2Inspection method and a photomaskTOSHIBA KK·Filed 2003·Granted Mar 6, 2007·4 cites·10 claims
- 4157US8097942B2Semiconductor device including power supply bar having jutted portion, parallel running portion and bent portion and manufacturing method thereforMISUMI KAZUYUKI·Filed 2009·Granted Jan 17, 2012·2 cites·4 claims
- 4257US6930757B2Managing method of exposure apparatus, managing method of mask, exposure method, and manufacturing method of semiconductor deviceTOSHIBA KK·Filed 2003·Granted Aug 16, 2005·4 cites·33 claims
- 4357US2019079391A1Imprint apparatus and imprint methodTOSHIBA MEMORY CORP·Filed 2018·Application pending·0 cites
- 4456US11762285B2Template, patterning method, and method for manufacturing semiconductor deviceKIOXIA CORP·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
- 4555US12050401B2Imprinting device, imprinting method, and method for manufacturing semiconductor deviceKIOXIA CORP·Filed 2021·Granted Jul 30, 2024·0 cites·16 claims
- 4655US11669011B2Template, template manufacturing method, and semiconductor device manufacturing methodKIOXIA CORP·Filed 2020·Granted Jun 6, 2023·0 cites·20 claims
- 4755US7286216B2Exposure apparatus inspection method and exposure apparatusTOSHIBA KK·Filed 2003·Granted Oct 23, 2007·3 cites·7 claims
- 4854US7327449B2Exposure apparatus inspection method and exposure apparatusTOSHIBA KK·Filed 2007·Granted Feb 5, 2008·0 cites·14 claims
- 4953US9040358B2Semiconductor device and method for manufacturing the sameRENESAS ELECTRONICS CORP·Filed 2014·Granted May 26, 2015·0 cites·12 claims
- 5052US8679731B2Semiconductor device manufacturing methodFUKUHARA KAZUYA·Filed 2012·Granted Mar 25, 2014·0 cites·8 claims
Showing the top 50 of 92 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →