Inventor · disambiguated record
Kazunori Funazaki
Also filed as: FUNAZAKI KAZUNORI
8 granted patents·1 pending application·39 citations·filing 2013–2018
81Inventor score
Top patents by PatentIndex Score
9 records- 0193US9418822B2Plasma processing apparatus, plasma processing method and high frequency generatorTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·29 cites·12 claims
- 0281US10109463B2Microwave automatic matcher and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Oct 23, 2018·3 cites·18 claims
- 0369US9355918B2Method for producing high-purity polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2013·Granted May 31, 2016·2 cites·6 claims
- 0463US9373483B2Plasma processing apparatus and high frequency generatorTOKYO ELECTRON LTD·Filed 2013·Granted Jun 21, 2016·1 cites·9 claims
- 0562US10074524B2Plasma processing apparatus and high frequency generatorTOKYO ELECTRON LTD·Filed 2013·Granted Sep 11, 2018·2 cites·18 claims
- 0662US9159536B2Plasma processing apparatus, abnormal oscillation determination method and high-frequency generatorTOKYO ELECTRON LTD·Filed 2014·Granted Oct 13, 2015·2 cites·7 claims
- 0744US10510513B2Plasma processing device and high-frequency generatorTOKYO ELECTRON LTD·Filed 2013·Granted Dec 17, 2019·0 cites·17 claims
- 0840US2019057843A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0935US9977070B2Method for inspecting magnetronTOKYO ELECTRON LTD·Filed 2015·Granted May 22, 2018·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →