Inventor · disambiguated record
Katsuyoshi Hamano
Also filed as: HAMANO KATSUYOSHI
5 granted patents·1 pending application·100 citations·filing 1996–2015
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0186US7767053B2Substrate processing apparatus and substrate processing methodHITACHI INT ELECTRIC INC·Filed 2007·Granted Aug 3, 2010·14 cites·3 claims
- 0282US5850071ASubstrate heating equipment for use in a semiconductor fabricating apparatusKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Dec 15, 1998·81 cites·15 claims
- 0373US9236246B2Substrate processing apparatus and a method of manufacturing a semiconductor deviceHAMANO KATSUYOSHI·Filed 2012·Granted Jan 12, 2016·4 cites·6 claims
- 0462US9646862B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted May 9, 2017·1 cites·15 claims
- 0547US9472424B2Substrate processing apparatus and a method of manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted Oct 18, 2016·0 cites·8 claims
- 0638US2006252283A1Substrate processing apparatus and sustrate processing methodHITACHI INT ELECTRIC INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →