Inventor · disambiguated record
Katsushige Harada
Also filed as: HARADA KATSUSHIGE
13 granted patents·4 pending applications·53 citations·filing 2003–2022
88Inventor score
Top patents by PatentIndex Score
17 records- 0193US8896097B2Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitorTOKYO ELECTRON LTD·Filed 2013·Granted Nov 25, 2014·16 cites·13 claims
- 0291US9230799B2Method for fabricating semiconductor device and the semiconductor deviceTERAMOTO AKINOBU·Filed 2012·Granted Jan 5, 2016·14 cites·11 claims
- 0382US9293543B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 22, 2016·5 cites·19 claims
- 0479US7968472B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Jun 28, 2011·5 cites·9 claims
- 0575US9574269B2Method and apparatus for forming thin filmTOKYO ELECTRON LTD·Filed 2015·Granted Feb 21, 2017·1 cites·2 claims
- 0667US9234275B2Method and apparatus of forming metal compound film, and electronic productTOKYO ELECTRON LTD·Filed 2013·Granted Jan 12, 2016·2 cites·10 claims
- 0765US11486043B2Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus thereforTOKYO ELECTRON LTD·Filed 2019·Granted Nov 1, 2022·0 cites·14 claims
- 0864US8336487B2Film forming apparatusISHIDA YOSHIHIRO·Filed 2011·Granted Dec 25, 2012·1 cites·5 claims
- 0961US2023137865A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1054US7041546B2Film forming method for depositing a plurality of high-k dielectric filmsTOKYO ELECTRON LTD·Filed 2003·Granted May 9, 2006·5 cites·4 claims
- 1154US2014367699A1Method for fabricating semiconductor device and the semiconductor deviceUNIV TOHOKU·Filed 2014·Application pending·0 cites
- 1253US7368384B2Film formation apparatus and method of using the sameTOKYO ELECTRON LTD·Filed 2005·Granted May 6, 2008·4 cites·13 claims
- 1341US8642127B2Method of forming titanium nitride filmMOROZUMI YUICHIRO·Filed 2012·Granted Feb 4, 2014·0 cites·7 claims
- 1436US2010186667A1Vertical heat processing apparatus and component for same, for forming high dielectric constant filmTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 1535US8389421B2Film formation method and film formation apparatusHARADA KATSUSHIGE·Filed 2011·Granted Mar 5, 2013·0 cites·8 claims
- 1633US8815112B2Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatusMIZUNO TSUYOSHI·Filed 2011·Granted Aug 26, 2014·0 cites·9 claims
- 1732US2015279683A1METHOD AND APPARATUS FOR FORMING TiSiN FILMTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →