Inventor · disambiguated record
Kay Hellig
Also filed as: HELLIG KAY
13 granted patents·1 pending application·488 citations·filing 2001–2004
93Inventor score
Top patents by PatentIndex Score
14 records- 0198US6893967B1L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materialsADVANCED MICRO DEVICES INC·Filed 2004·Granted May 17, 2005·246 cites·16 claims
- 0291US6673635B1Method for alignment mark formation for a shallow trench isolation processADVANCED MICRO DEVICES INC·Filed 2002·Granted Jan 6, 2004·55 cites·14 claims
- 0389US6696334B1Method for formation of a differential offset spacerADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 24, 2004·55 cites·19 claims
- 0479US6881616B1System for forming a semiconductor device and method thereof including implanting through a L shaped spacer to form source and drain regionsADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 19, 2005·24 cites·9 claims
- 0577US6979651B1Method for forming alignment features and back-side contacts with fewer lithography and etch stepsADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 27, 2005·19 cites·15 claims
- 0673US6699641B1Photosensitive bottom anti-reflective coatingADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 2, 2004·16 cites·25 claims
- 0772US7256113B1System for forming a semiconductor device and method thereofADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 14, 2007·19 cites·22 claims
- 0868US7151055B2Technique for forming a gate electrode by using a hard maskADVANCED MICRO DEVICES INC·Filed 2004·Granted Dec 19, 2006·13 cites·17 claims
- 0966US6828240B2Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuitsADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 7, 2004·13 cites·18 claims
- 1064US6703297B1Method of removing inorganic gate antireflective coating after spacer formationADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 9, 2004·9 cites·25 claims
- 1162US7130762B2Method and system for handling substrates in a production line including a cluster tool and a metrology toolADVANCED MICRO DEVICES INC·Filed 2003·Granted Oct 31, 2006·14 cites·19 claims
- 1256US6902870B1Patterning of dielectric with added layers of materials aside from photoresist for enhanced pattern transferADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 7, 2005·5 cites·15 claims
- 1337US2004043618A1Method for endpoint detection during etchADVANCED MICRO DEVICES INC·Filed 2002·Application pending·0 cites
- 1434US7962459B2Method of providing context specific recipes in a semiconductor facility by defining product categoriesGLOBALFOUNDRIES INC·Filed 2003·Granted Jun 14, 2011·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →