Inventor · disambiguated record
Kaori Inoshima
Also filed as: INOSHIMA KAORI
5 granted patents·2 pending applications·6 citations·filing 2006–2023
68Inventor score
Top patents by PatentIndex Score
7 records- 0175US10131992B2Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Nov 20, 2018·2 cites·10 claims
- 0269US10096501B2Maintenance method of substrate processing apparatus, method for manufacturing semiconductor device, substrate processing apparatus, and storage medium capable of reading maintenance program of substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2014·Granted Oct 9, 2018·3 cites·10 claims
- 0359US7808396B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2006·Granted Oct 5, 2010·1 cites·10 claims
- 0448US2023326771A1Substrate processing apparatus, apparatus start-up method, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0547US2022262630A1Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0638US8482426B2Substrate processing apparatusIIDA TSUKASA·Filed 2010·Granted Jul 9, 2013·0 cites·18 claims
- 0737US9690879B2Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipeHITACHI INT ELECTRIC INC·Filed 2013·Granted Jun 27, 2017·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →