Inventor · disambiguated record
Kazuya Iwanaga
Also filed as: IWANAGA KAZUYA
2 granted patents·3 citations·filing 2015–2019
37Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0175US11469116B2Substrate processing apparatus and substrate processing methodTOYKO ELECTRON LTD·Filed 2019·Granted Oct 11, 2022·3 cites·9 claims
- 0235US10713772B2Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Jul 14, 2020·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →