Inventor · disambiguated record
Kantilal Jain
Also filed as: JAIN KANTILAL
11 granted patents·761 citations·filing 1976–1989
93Inventor score
Top patents by PatentIndex Score
11 records- 0197US4924257AScan and repeat high resolution projection lithography systemJAIN KANTILAL·Filed 1988·Granted May 8, 1990·266 cites·22 claims
- 0295US5059013AIllumination system to produce self-luminous light beam of selected cross-section, uniform intensity and selected numerical apertureJAIN KANTILAL·Filed 1988·Granted Oct 22, 1991·159 cites·22 claims
- 0394US4382660AOptical transistors and logic circuits embodying the sameMASSACHUSETTS INST TECHNOLOGY·Filed 1976·Granted May 10, 1983·79 cites·16 claims
- 0493US4881231AFrequency-stabilized line-narrowed excimer laser source system for high resolution lithographyJAIN KANTILAL·Filed 1988·Granted Nov 14, 1989·70 cites·22 claims
- 0588US4458994AHigh resolution optical lithography method and apparatus having excimer laser light source and stimulated Raman shiftingIBM·Filed 1983·Granted Jul 10, 1984·45 cites·50 claims
- 0681US4516832AApparatus for transformation of a collimated beam into a source of _required shape and numerical apertureIBM·Filed 1982·Granted May 14, 1985·38 cites·17 claims
- 0779US4991962AHigh precision alignment system for microlithographyJAIN KANTILAL·Filed 1989·Granted Feb 12, 1991·32 cites·16 claims
- 0874US4252410APolarization rotation method and apparatusHEWLETT PACKARD CO·Filed 1978·Granted Feb 24, 1981·26 cites·26 claims
- 0961US4444456AHolographic method and apparatus for transformation of a light beam into a line source of required curvature and finite numerical apertureIBM·Filed 1982·Granted Apr 24, 1984·16 cites·5 claims
- 1059US4547044ABeam-folding wedge tunnelIBM·Filed 1983·Granted Oct 15, 1985·15 cites·6 claims
- 1153US4521087AOptical system with diffuser for transformation of a collimated beam into a self-luminous arc with required curvature and numerical apertureIBM·Filed 1983·Granted Jun 4, 1985·15 cites·8 claims
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