Inventor · disambiguated record
Kazushi Kaneko
Also filed as: KANEKO KAZUSHI
30 granted patents·15 pending applications·104 citations·filing 2013–2025
94Inventor score
Files withTOKYO ELECTRON LTD45
Top patents by PatentIndex Score
45 records- 0194US11094507B2Power generation systems and methods for plasma stability and controlTOKYO ELECTRON LTD·Filed 2019·Granted Aug 17, 2021·13 cites·22 claims
- 0294US10748746B2Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 18, 2020·42 cites·20 claims
- 0393US9418822B2Plasma processing apparatus, plasma processing method and high frequency generatorTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·29 cites·12 claims
- 0483US11050394B2Modules, multi-stage systems, and related methods for radio frequency power amplifiersTOKYO ELECTRON LTD·Filed 2019·Granted Jun 29, 2021·4 cites·24 claims
- 0582US9305751B2Microwave plasma processing apparatus and microwave supplying methodTOKYO ELECTRON LTD·Filed 2014·Granted Apr 5, 2016·4 cites·5 claims
- 0681US10109463B2Microwave automatic matcher and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Oct 23, 2018·3 cites·18 claims
- 0777US9241397B2Microwave plasma processing apparatus and microwave supply methodTOKYO ELECTRON LTD·Filed 2014·Granted Jan 19, 2016·4 cites·7 claims
- 0871US12412732B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Sep 9, 2025·0 cites·11 claims
- 0971US11721524B2Power generation systems and methods for plasma stability and controlTOKYO ELECTRON LTD·Filed 2021·Granted Aug 8, 2023·0 cites·20 claims
- 1066US2025372348A1Radio-frequency power source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1164US2024371603A1Plasma processing apparatus, analysis apparatus, plasma processing method, analysis method, and storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1263US9373483B2Plasma processing apparatus and high frequency generatorTOKYO ELECTRON LTD·Filed 2013·Granted Jun 21, 2016·1 cites·9 claims
- 1363US2024339300A1Plasma Processing ApparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1463US2025006464A1Plasma processing apparatus, analysis apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1563US2025095973A1Plasma Processing Apparatus and Method for Measuring Resonance FrequencyTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1663US2024339304A1Plasma Processing Apparatus and Plasma Control MethodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1763US2024203692A1Plasma processing apparatus and plasma control methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1862US11887816B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 30, 2024·0 cites·5 claims
- 1962US10074524B2Plasma processing apparatus and high frequency generatorTOKYO ELECTRON LTD·Filed 2013·Granted Sep 11, 2018·2 cites·18 claims
- 2062US9159536B2Plasma processing apparatus, abnormal oscillation determination method and high-frequency generatorTOKYO ELECTRON LTD·Filed 2014·Granted Oct 13, 2015·2 cites·7 claims
- 2161US2024186114A1Plasma processing apparatus and assembly method of resonator array structureTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2261US2024234092A9Frequency-variable power supply and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2361US2024186113A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2459US12191116B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jan 7, 2025·0 cites·12 claims
- 2554US10796886B2Detection device, microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 6, 2020·0 cites·10 claims
- 2653US9633821B2Microwave plasma processing apparatus and microwave supplying methodTOKYO ELECTRON LTD·Filed 2016·Granted Apr 25, 2017·0 cites·6 claims
- 2752US11587769B2Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Feb 21, 2023·0 cites·5 claims
- 2851US11527386B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Dec 13, 2022·0 cites·3 claims
- 2950US11209515B2Method of determining correction functionTOKYO ELECTRON LTD·Filed 2020·Granted Dec 28, 2021·0 cites·14 claims
- 3048US2021020406A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3146US11249126B2Method of determining correction functionTOKYO ELECTRON LTD·Filed 2020·Granted Feb 15, 2022·0 cites·2 claims
- 3246US9875882B2Microwave plasma processing apparatus, slot antenna, and semiconductor deviceTOKYO ELECTRON LTD·Filed 2014·Granted Jan 23, 2018·0 cites·7 claims
- 3345US10662531B2Plasma processing apparatus, abnormality determination method, and microwave generatorTOKYO ELECTRON LTD·Filed 2014·Granted May 26, 2020·0 cites·20 claims
- 3444US10971337B2Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 6, 2021·0 cites·15 claims
- 3544US10679826B2Microwave control methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 9, 2020·0 cites·8 claims
- 3644US10510513B2Plasma processing device and high-frequency generatorTOKYO ELECTRON LTD·Filed 2013·Granted Dec 17, 2019·0 cites·17 claims
- 3743US10847353B2Pulse monitor device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 24, 2020·0 cites·20 claims
- 3841US11031213B2Microwave output device and plasma processing deviceTOKYO ELECTRON LTD·Filed 2018·Granted Jun 8, 2021·0 cites·12 claims
- 3940US11569068B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jan 31, 2023·0 cites·2 claims
- 4040US2019057843A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 4140US2018277339A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 4236US10879045B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 29, 2020·0 cites·1 claims
- 4335US9977070B2Method for inspecting magnetronTOKYO ELECTRON LTD·Filed 2015·Granted May 22, 2018·0 cites·11 claims
- 4435US2019244789A1Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 4531US2019267216A1Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Kazushi Kaneko files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →