Inventor · disambiguated record
Kazunori Kazama
Also filed as: KAZAMA KAZUNORI
5 granted patents·16 citations·filing 2005–2019
72Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0185US7756599B2Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the programTOKYO ELECTRON LTD·Filed 2005·Granted Jul 13, 2010·10 cites·8 claims
- 0274US10254774B2Temperature control method, control apparatus, and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Apr 9, 2019·4 cites·14 claims
- 0371US10460949B2Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Oct 29, 2019·2 cites·10 claims
- 0439US8172949B2Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the programKUDO TOMOYUKI·Filed 2010·Granted May 8, 2012·0 cites·7 claims
- 0533US12387955B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 12, 2025·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →