Inventor · disambiguated record
Kae Kumagai
Also filed as: KUMAGAI KAE
8 granted patents·3 pending applications·0 citations·filing 2020–2025
72Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD11
Top patents by PatentIndex Score
11 records- 0173US2025323055A1Etching methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0270US12512325B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Dec 30, 2025·0 cites·16 claims
- 0369US12482651B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 25, 2025·0 cites·14 claims
- 0466US11545355B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 3, 2023·0 cites·18 claims
- 0565US12074009B2Apparatus for processing a substrateTOKYO ELECTRON LTD·Filed 2021·Granted Aug 27, 2024·0 cites·18 claims
- 0665US2023268191A1Etching methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0761US11201062B2Method and apparatus for processing a substrateTOKYO ELECTRON LTD·Filed 2020·Granted Dec 14, 2021·0 cites·9 claims
- 0859US12368027B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 22, 2025·0 cites·15 claims
- 0956US11171012B1Method and apparatus for formation of protective sidewall layer for bow reductionTOKYO ELECTRON LTD·Filed 2020·Granted Nov 9, 2021·0 cites·18 claims
- 1055US2023215700A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1150US11996296B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2021·Granted May 28, 2024·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →