Inventor · disambiguated record
Katsuhiro Morikawa
Also filed as: MORIKAWA KATSUHIRO
40 granted patents·3 pending applications·609 citations·filing 1998–2022
97Inventor score
Top patents by PatentIndex Score
43 records- 0197US11532492B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 20, 2022·5 cites·15 claims
- 0296US8528889B2Device and method for supporting a substrateNAKANO SEIJI·Filed 2010·Granted Sep 10, 2013·142 cites·9 claims
- 0394US11208725B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 28, 2021·10 cites·17 claims
- 0490US10042356B2Substrate processing apparatus, method for correcting positional displacement, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Aug 7, 2018·7 cites·13 claims
- 0590US7563042B2Substrate carrying apparatus, substrate carrying method, and coating and developing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 21, 2009·16 cites·13 claims
- 0688US6710859B2Distance measurement apparatusDENSO CORP·Filed 2001·Granted Mar 23, 2004·85 cites·10 claims
- 0788US6147637AObstacle detecting system for automotive vehicleDENSO CORP·Filed 1998·Granted Nov 14, 2000·94 cites·10 claims
- 0886US10460976B2Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 29, 2019·5 cites·9 claims
- 0986US6466863B2Traveling-path estimation apparatus for vehicleDENSO CORP·Filed 2001·Granted Oct 15, 2002·49 cites·10 claims
- 1083US11637035B2Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereofTOKYO ELECTRON LTD·Filed 2019·Granted Apr 25, 2023·3 cites·19 claims
- 1179US11551945B2Substrate processing apparatus including periphery cover bodyTOKYO ELECTRON LTD·Filed 2019·Granted Jan 10, 2023·2 cites·14 claims
- 1279US6484087B2Method of selecting a preceding vehicle, a preceding vehicle selecting apparatus, and a recording medium for selecting a preceding vehicleDENSO CORP·Filed 2001·Granted Nov 19, 2002·34 cites·17 claims
- 1376US9627238B2Substrate transfer apparatus, substrate transfer method, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Apr 18, 2017·4 cites·3 claims
- 1476US9373531B2Substrate transfer device, substrate processing apparatus, and substrate accommodation methodTOKYO ELECTRON LTD·Filed 2014·Granted Jun 21, 2016·3 cites·13 claims
- 1576US7602477B2Radar deviceDENSO CORP·Filed 2005·Granted Oct 13, 2009·12 cites·10 claims
- 1674US9696262B2Substrate processing apparatus, method of operating substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Jul 4, 2017·3 cites·16 claims
- 1773US7987019B2Substrate transfer method and substrate transfer apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 26, 2011·3 cites·6 claims
- 1871US8441618B2Substrate transfer method and apparatusNAKAHARADA MASAHIRO·Filed 2010·Granted May 14, 2013·4 cites·8 claims
- 1970US11510284B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 22, 2022·1 cites·19 claims
- 2067US6757054B2Time measurement apparatus, distance measurement apparatus, and clock signal generating apparatus usable thereinDENSO CORP·Filed 2003·Granted Jun 29, 2004·20 cites·9 claims
- 2165US6657704B2Distance measurement apparatusDENSO CORP·Filed 2002·Granted Dec 2, 2003·21 cites·8 claims
- 2265US6567039B2Road-shape recognition systemDENSO CORP·Filed 2001·Granted May 20, 2003·20 cites·11 claims
- 2364US9666463B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted May 30, 2017·1 cites·6 claims
- 2463US7158217B2Vehicle radar deviceDENSO CORP·Filed 2003·Granted Jan 2, 2007·18 cites·13 claims
- 2559US6553283B2Method and apparatus for recognizing shape of roadDENSO CORP·Filed 2001·Granted Apr 22, 2003·15 cites·6 claims
- 2655US11244849B2Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 8, 2022·0 cites·10 claims
- 2755US6553282B2Method and apparatus for recognizing shape of roadDENSO CORP·Filed 2001·Granted Apr 22, 2003·10 cites·15 claims
- 2855US6380885B2Obstacle recognition system for vehicleDENSO CORP·Filed 2001·Granted Apr 30, 2002·12 cites·12 claims
- 2953US12109580B2Processing liquid nozzle and cleaning apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 8, 2024·0 cites·17 claims
- 3051US2022347711A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 3149US11600500B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 7, 2023·0 cites·15 claims
- 3249US11097907B2Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2018·Granted Aug 24, 2021·0 cites·13 claims
- 3349US7528766B2Radar device for transmitting radio signal over angular scanning fieldDENSO CORP·Filed 2007·Granted May 5, 2009·1 cites·12 claims
- 3448US12463064B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 4, 2025·0 cites·9 claims
- 3548US12276027B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Apr 15, 2025·0 cites·11 claims
- 3648US11515182B2Drying apparatus, substrate processing system, and drying methodTOKYO ELECTRON LTD·Filed 2020·Granted Nov 29, 2022·0 cites·17 claims
- 3747US10128138B2Substrate transfer method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Nov 13, 2018·0 cites·5 claims
- 3846US6665056B2Method and apparatus for measuring distance to a detection objectDENSO CORP·Filed 2002·Granted Dec 16, 2003·5 cites·8 claims
- 3945US8554360B2Substrate transfer method and substrate transfer apparatusMORIKAWA KATSUHIRO·Filed 2011·Granted Oct 8, 2013·0 cites·6 claims
- 4045US2022056590A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 4144US9773690B2Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport containerTOKYO ELECTRON LTD·Filed 2013·Granted Sep 26, 2017·0 cites·13 claims
- 4244US6628374B2Distance measurement apparatusDENSO CORP·Filed 2002·Granted Sep 30, 2003·4 cites·6 claims
- 4337US2012154914A1Interference filter assemblyMORIGUCHI CHIHIRO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →