Inventor · disambiguated record
Kathleen Nafus
Also filed as: NAFUS KATHLEEN
7 granted patents·1 pending application·114 citations·filing 2003–2019
82Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0192US7673278B2Enhanced process yield using a hot-spot libraryTOKYO ELECTRON LTD·Filed 2007·Granted Mar 2, 2010·26 cites·8 claims
- 0290US7070915B2Method and system for drying a substrateTOKYO ELECTRON LTD·Filed 2003·Granted Jul 4, 2006·81 cites·34 claims
- 0377US9418834B2System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrateTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·5 cites·20 claims
- 0470US10490402B2UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assemblyTOKYO ELECTRON LTD·Filed 2014·Granted Nov 26, 2019·2 cites·22 claims
- 0560US11538684B2UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assemblyTOKYO ELECTRON LTD·Filed 2019·Granted Dec 27, 2022·0 cites·14 claims
- 0647US7582414B2Method and system for drying a substrateTOKYO ELECTRON LTD·Filed 2006·Granted Sep 1, 2009·0 cites·18 claims
- 0745US10438806B2Methods and system of using organosilicates as patterning filmsTOKYO ELECTRON LTD·Filed 2018·Granted Oct 8, 2019·0 cites·19 claims
- 0842US2008241400A1Vacuum assist method and system for reducing intermixing of lithography layersTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →